Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor

DETAILED DESCRIPTION In accordance with the invention, an integrated circuit structure is provided with an inductor formed therein which comprises a metal coil on an insulated surface over a semiconductor substrate, and a high magnetic susceptibility cobalt/nickel metal core located adjacent said metal coil, but spaced therefrom by one or more insulation layers.
In one embodiment, the high magnetic susceptibility cobalt/nickel metal core is placed between lower and upper portions of the metal coil which are interconnected together by filled vias.
In another embodiment, the metal coil is formed in a serpentine shape in one plane on an insulated surface over the semiconductor substrate, and the high magnetic susceptibility cobalt/nickel metal core is formed over the serpentine coil, but spaced from the serpentine coil by another insulation layer.