MEMS optical cross-connect switch

DETAILED DESCRIPTION The present invention provides for a microelectromechanical structure capable of switching optical fibers from an input fiber to one of two or more output fibers.
In one embodiment, the MEMS optical cross-connect switch comprises a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a rotational magnetic field source disposed proximate the first substrate that provides the actuation force to the pop-up mirror.
The rotational magnetic field may comprise a variably controlled magnetic field capable of maximizing torque throughout the actuation period.
The variably controlled magnetic field may comprise a pair of wire coils having generally orthogonal magnetic field axis.
The variably controlled magnetic field source can be adjusted during actuation by varying the current supplied to the coil(s) thereby maximizing the magnetic torque and generating optimal actuation force throughout the movement of the pop-up mirror from the non-reflective to reflective state, Additionally, a magnetic pole piece may be positioned proximate the second microelectronic substrate to provide further magnetic attraction to the pop-up mirror.
Additionally, this embodiment may comprise at least one positioning structure disposed so as to act as a stop-gate for positioning the pop-up mirror in a reflective state.
The positioning structure may comprise a pillar-like structure extending from a second microelectronic substrate that is in a fixed positional relationship relative to the first microelectronic substrate.
The positioning structure may be electrostatically activated through a voltage source connected to the second substrate such that electrostatic activation of the positioning structure causes the pop-up mirror to be "locked" in the "upright", reflective state.
In addition, the MEMS optical cross-connect.
switch of this embodiment may comprise a tether device that may be electrostatically activated through connection to the first substrate to provide a "clamp-down" voltage to the pop-up mirror in the pop-up mirror's prone, non-reflective state