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MEMS optical switch with a notched latching apparatus for improved mirror positioning and method of fabrication thereof
| Details |
Inventors: Fan, Li;
Assignee: OMM, Inc. (San Diego, CA)
Primary Examiner: Kim; Ellen E.
Assistant Examiner:
Attorney, Agent or Firm: Ferrell; Arien C. T. Aagaard & Balzan, LLP, Aagaard; Eric J.
In at least one embodiment, the apparatus includes an actuator arm, a mirror structure, and a latch mounted between the arm and the mirror structure. The latch has a first end mounted to the arm and a fastener connected to the mirror structure. The fastener has a fastener support surface and a fastener side surface, where the fastener support surface is in contact with the mirror structure. The fastener support surface and the fastener side surface are angled to each other to define a fastener corner. At the fastener corner is a fastener notch. Likewise, the mirror structure can include a catch for receiving the latch on a substantially flat catch support surface, which is created by a catch notch at the corner of the catch support and side surfaces. In at least one embodiment, the method includes steps of fabrication of the apparatus. |
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DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS OF THE INVENTION The present invention is embodied in a notched latching mechanism apparatus and a method of fabricating the same.
In one embodiment, the invention includes a latch with notched fasteners and a mirror structure with notched catches.
The latch notches are located near where the latch interconnects with a mirror structure.
Likewise, the catch notches are positioned at the corners of the catch which receives the latch member.
An advantage of some embodiments the present invention is greater accuracy in the positioning of the mirror.
This improved positioning dramatically reduces the potential for misalignment of the reflected light beam with the receiving optical fiber.
As an example, in some embodiments, the present invention has reduced variations in mirror positioning to substantially less than .
+-.
0.
1 degrees.
Generally, the present invention provides 5-10 times more accurate positioning than prior devices.
This improved positioning accuracy in turn provides a much lower rate of loss of devices during fabrication.
This improved positioning advantage is achieved by eliminating the rounded corners (rounding area) at the connecting points between the mirror structure and latches of the prior devices.
These rounded corners where located were the fasteners and catches contacted each other, as shown in FIGS.
3 and 4.
Since the rounded corners allow a relatively large range of possible positions of the contact points between the latch and the mirror structure, the resulting position of the mirror would vary greatly from device to device.
In some embodiments of the present invention, the rounded corners are removed by placing a notch at each corner.
Such notches are shown in FIGS.
6-8, with FIG.
8 showing the interconnection of a fastener and a catch.
Although the resulting structure is not a true corner, as one edge never directly intersects with the other edge (the notch preventing this), the resulting structure functions as a corner
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MEMS 
