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Mechanical grating device
| Details |
Inventors: Hawkins, Gilbert A.; Lebens, John A.; Anagnostopoulos, Constantine N.; Brazas, Jr., John C.; Kruschwitz, Brian E.;
Assignee: Eastman Kodak Company (Rochester, NY)
Primary Examiner: Epps; Georgia
Assistant Examiner: Thompson; Tim
Attorney, Agent or Firm: Close; Thomas H., Shaw; Stephen H.
A mechanical grating device for diffracting an incident light beam has a base which defines a surface. A spacer layer is provided above the base, said spacer layer defining an upper surface of said spacer layer. A longitudinal channel is formed in said spacer layer, said channel having a first and second opposing side walls and a bottom. The side walls are substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device. A plurality of spaced apart deformable ribbon elements are disposed parallel to each other and span the channel. The deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel. |
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DETAILED DESCRIPTION It is an object of the present invention to provide a mechanical grating device which has equal actuation conditions for the deformable elements in order to improve the diffraction efficiency of the device.
The object is achieved with a mechanical grating device comprising: a base having a surface; a spacer layer provided above the base, said spacer layer defining an upper surface and a longitudinal channel is formed in said spacer layer, said channel having a first and second opposing side wall and a bottom, said side walls being substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device; and a plurality of spaced apart deformable ribbon elements disposed parallel to each other and spanning the channel, said deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel.
Another object is to provide a electromechanical grating device which has equal actuation conditions for the deformable elements of the device in order to improve the diffraction efficiency of the device.
These objects are achieved with a electromechanical grating device comprising: a base having a surface; a bottom conductive layer provided within said base; a spacer layer provided above the base, said spacer layer defining an upper surface and a longitudinal channel formed in said spacer layer, said channel having a first and second opposing side wall and a bottom, said side walls being substantially vertically disposed with respect to the bottom, and said channel having a constant cross section along the entire length of the mechanical grating device; and a plurality of spaced apart deformable ribbon elements disposed parallel to each other and spanning the channel, said deformable ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel and each deformable ribbon element is provided with a conductive layer.
An advantage of the mechanical or the electromechanical grating device of the present invention is that an improved definition of the position of the channel walls beneath the deformable ribbon elements allow reproducible ribbon length
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MEMS 
