Method for fabricating a head/slider assembly integrated with a track-following micro actuator

DETAILED DESCRIPTION It is, therefore, a primary object of the present invention to provide a head/slider assembly integrated therein a track-following micro actuator to allow it to be used in a HDD system of a very high track density and method for fabricating the same.
The above and other objects of the invention are accomplished by providing a method for fabricating a head/slider assembly integrated with an track-following electrostatic micro actuator, the method comprising the steps of: forming a micro actuator structure layer on a slider substrate with a cavity formed therebetween; forming metal signal lines on the micro actuator structure layer; forming a read/write magnetic head on a central part of the micro actuator structure layer; etching to separate the micro actuator and the read/write magnetic head; and forming a protective cover on top of the micro actuator and the read/write head to form the head/slider assembly.