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Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation
In general, the invention disclosed refers to gas phase release of any number of microstructure layers whose movement is independent or coupled and which are ...
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Magnetoresistive element and magnetic memory device
OF THE INVENTION Basic structures of magnetoresistive elements according to the present invention will be described hereinafter, referring to FIGS. 1 to 4. FIG. 1 shows ...
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Method of fabricating DRAM capacitor
It is therefore the object of the invention to provide an improved and simplified method of fabricating DRAM capacitors. This method uses tungsten nitride as the MIM ...
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8-beam bridge-type silicon acceleration sensor and the fabricating method thereof
OF THE PREFERRED EMBODIMENT For a better understanding of the present invention, together with other and further objects, advantages and capabilities thereof, reference ...
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Transducer having a resonating silicon beam and method for forming same
The invention provides apparatus including a force transducer having a resonating beam that is formed in a silicon wafer and which apparatus is of relatively simple and ...
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Method of manufacturing an electronic part having an air-bridge interconnection
In view of the aforementioned problems, an object of the present invention is to provide an electronic part having an air-bridge interconnection in which an air-bridge ...
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High frequency semiconductor device
A high frequency semiconductor device of the present invention includes: a substrate having a substantially flat principal surface, with a predetermined circuit pattern ...
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Method for manufacturing an SOI wafer
The present invention, in one aspect, provides a method for manufacturing SOI wafers, which exploits the intrinsic advantages of microfabrication technologies, but at ...
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Polymer based tunneling sensor
The present invention includes a process for fabricating a polymer based micro-machine by the following steps. A mold of a design is formed through a lithography process....
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Solid-state imaging device
It is an object of the present invention to provide a highly sensitive solid-state imaging device and a method for manufacturing such a highly sensitive solid-state ...
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