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Home MEMS Method-of-forming-robust-metal-metal-oxide-and-metal-alloy-layers-on-ion-conductive-polymer-membranes

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Details
Inventors: Allen, Robert J.; Giallombardo, James R.;
Assignee: De Nora S.p.A. (IT)
Primary Examiner: Nuzzolillo; Maria
Assistant Examiner: Ruthkosky; Mark
Attorney, Agent or Firm: Bierman, Muserlian and Lucas

The invention is to a dual beam process for providing an ion-conducting membrane with a thin metal or metal-oxide film. The process includes the cleaning of a membrane surface with a low energy electron beam followed by the deposition of the metal or metal-oxide film by a high energy electron beam of ions.

DETAILED DESCRIPTION What we claim is: 1.
A dual beam assisted deposition process for the purpose of an ion-conducting membrane provided with a thin metal or metal oxide film comprising subjecting the ion-conductive membrane under vacuum to an electron beam having an energy less than 500 eV to clean the membrane surface and subjecting the cleaned membrane under vacuum to a beam having an energy between 500 to 2000 eV and containing ions of the metal to be deposited to form the metal or metal oxide film.
2.
The process of claim 1 wherein the metal to be deposited is platinum.
3.
The process of claim 1 wherein the metal oxide to be deposited is tungsten oxide.
4.
The process of claim 1 wherein the metal to be deposited is an alloy of platinum group metals.
5.
A metallized membrane structure produced by the process of claim 1.
6.
The membrane of claim 5 wherein the metal film is highly porous.
7.
The membrane of claim 5 wherein the metal film is highly dense and impervious.
8.
The membrane of claim 5 wherein the metal or metal oxide is a platinum group metal.
9.
The membrane of claim 8 wherein the metal is platinum.
10.
The membrane of claim 8 wherein the metal oxide is tungsten oxide.
11.
In a fuel cell with an anode and a cathode separated by an ion-conductive membrane, the improvement consisting of using a membrane of claim 5 as the anode-membrane.
12.
The fuel cell of claim 11 wherein the membrane is provided with a platinum metal film.
13.
The fuel cell of claim 11 wherein the membrane is provided with a tungsten oxide film.
14.
In a process of oxidizing methanol at the anode and reducing oxygen at the cathode in a fuel cell, the improvement comprising using the fuel cell of claim 11 wherein the film is impervious to methanol transport.
15.
The process of claim 14 wherein the film is tungsten oxide film.




Description:
BACKGROUND This invention relates to a new method to coat metals, metal oxides, or metal alloys onto solid polymer electrolytes or other ion-conducting polymer surfaces



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