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MEMS

Micromechanical-microwave-switching

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Method for fabricating a semiconductor device having contacts self-aligned with a gate electrode thereof

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Method of fabricating polysilicon film by nickel/copper induced lateral crystallization

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Magnetic spin transistor device, logic gate & method of operation

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Micromechanical microwave switching

Details

Inventors: Goldsmith, Charles; Kanack, Bradley M.; Lin, Tsen-Hwang; Norvell, Bill R.; Pang, Lily Y.; Powers, Jr., Billy; Rhoads, Charles; Seymour, David;
Assignee: Texas Instruments Incorporated (Dallas, TX)
Primary Examiner: Prenty; Mark V.
Assistant Examiner:
Attorney, Agent or Firm: Maginniss; Christopher L., Kesterson; James C., Donaldson; Richard L.

Micromechanical microwave switches with both ohmic and capacitive coupling of rf lines and integration in multiple throw switches useful in microwave arrays.

DETAILED DESCRIPTION The present invention provides micromechanical microwave switches and arrays of switches with membranes and flaps supported on at least two sides.
The invention has advantages including switches with no power consumption, low cost, and linearity; and also compatibility with both silicon and gallium arsenide integrated circuits.

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