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Multi-element micro gyro
| Details |
Inventors: Hsu, Ying W.; Reeds, III, John W.; Saunders, Christ H.;
Assignee: Irvine Sensors Corporation (Costa Mesa, CA)
Primary Examiner: Chapman; John E.
Assistant Examiner:
Attorney, Agent or Firm: Plante; Thomas J.
A micro-gyro device is disclosed combining an element which oscillates around the drive axis and an element which rocks around the output axis, so arranged that Coriolis force is transmitted from one element of the other without any substantial transfer of motion of either element to the other in its own direction of motion. In other words, the masses of the two elements operate independently of one another, providing improved performance, and individual adjustability to compensate for any manufacturing imprecision. The presently-preferred device combines an outer ring which oscillates around the drive axis with an inner disk which rocks around the output axis, whenever external rotating motion occurs about the rate axis. |
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DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS FIGS.
1 and 2 are isometric views showing a micro-gyro device.
FIG.
1 shows first and second elements in the micro-gyro, which are movable within the gyro around different axes, the first moving in a vibrating, or oscillating, mode around the drive axis to create a constant driving momentum.
The second moves around an output axis normal to the drive axis, in response to the Coriolis force.
FIG.
2 shows the substrate, or platform, which supports the first and second elements, and which moves as part of the entire micro-gyro under the influence of external motion which is the value being measured.
This external motion is around the rate axis.
FIG.
3 is a plan view of the two elements shown in FIG.
1, with an electrical diagram added.
The elements of the micro-gyro and the substrate may be formed of silicon chip material (or other easily shaped, inexpensive material).
An outer ring-shaped element 20 is used as the driving element, and an inner disk-shaped element 22 is used as the sensing element.
The elements 20 and 22 have essentially independent motion around different axes.
The outer element 20 is caused to oscillate at a predetermined rate around a drive axis 21, which is perpendicular to the plane of the micro-gyro.
The inner element 22 is caused by Coriolis force to oscillate, or rock, around an output axis 24, which is in the plane of the gyro elements.
The two element gyro is supported on a substrate 26, on which two anchor posts 28 and 30 are mounted.
The inner disk element 22 is pivotally mounted on anchor posts 28 and 30 by means of aligned hinges 32 and 34, and is caused by Coriolis force to oscillate, or attempt to oscillate, around the output axis 24.
The two anchors 28 and 30 support the disk and ring structures 20 and 22, and also space the movable elements 20 and 22 from the substrate 26.
The location of anchors 28 and 30 is within the space surrounded by ring element 20, in order to enhance the separation of motion of the driving and sensing elements
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MEMS 
