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Home MEMS Optically-controlled-MEM-switches

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 Optically controlled MEM switches

Details
Inventors: Hsu, Tsung-Yuan; Loo, Robert Y.; Tangonan, Greg; Lam, Juan F.;
Assignee: HRL Laboratories, LLC (Malibu, CA)
Primary Examiner: Le; Que T.
Assistant Examiner:
Attorney, Agent or Firm: Ladas & Parry

An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

DETAILED DESCRIPTION The present invention alleviates the above-noted problem of providing control lines for an array MEM switches, and provides other benefits as well.
In particular, it provides a mechanism for controlling MEM switches with light, with attendant benefits such as isolation, and indeed remoteness, from a controlling light source.
The present invention provides optical control of MEM switches.
In a preferred embodiment, two DC bias lines are provided to the vicinity of each MEM switch.
On-off control of the switch is then effected by focusing light on the switch substrate.
Under illumination, the photo-conductive nature of the semi-insulated substrate causes voltage loss in a series bias resistor to reduce the DC bias voltage applied to the switch.
The switches may be used in combination to control an antenna array.
Another embodiment of the invention employs a photovoltaic device to provide actuating voltage under illumination, thus obviating all bias lines.



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