Perpendicular torsion micro-electromechanical switch

DETAILED DESCRIPTION In one aspect of the invention, the overall switch area of the MEM switch that is required to make good contact and provide the necessary electrostatic controls is greatly reduced by placing the controls in a direction perpendicular to the switch contacts.
This not only moves the control surface area in a perpendicular direction, but it also shortens the length of the beam due to the added leverage gained in the perpendicular arrangement.
The same leverage lowers the control voltage requirements since the spacing between the control electrodes can be reduced without downsizing the spacing between the signal electrodes.
In another aspect of the invention, the problem occurring in MEM switches known as stiction (i.
e.
, the tendency for surfaces making contact to stick together and not release when the control voltage is dropped) is greatly reduced.
The inventive MEM switch addresses this problem by having opposing control surfaces supply the necessary attraction in either direction, thus overcoming stiction.
In still another aspect of the invention, isolation of the control signal from the switching signal is provided.
The inventive MEM switching device physically and electrically isolates the two conducting paths.
It also provides an added isolation by significantly increasing the spacing between the signal electrodes by rearranging the various elements forming the MEM switch.
The invention further provides for single and multiple pole devices.
In yet another aspect of the invention, there is provided a semiconductor MEM switch that includes: a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control electrode, the insulated torsion beam and the movable control electrode being parallel to each other; and at least one movable contact attached to the insulated torsion beam, wherein the combination of the insulated torsion beam and the control electrode is perpendicular to the movable contact.