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| Micro-electromechanical system device |
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Phased micro analyzer IV
| Details |
Inventors: Bonne, Ulrich;
Assignee: Honeywell International Inc. (Morristown, NJ)
Primary Examiner: Williams; Hezron
Assistant Examiner: Fitzgerald; John
Attorney, Agent or Firm: Fredrick; Kris T.
A fluid analyzer having a concentrator and separator for concentrating and separating fluid samples at pressures up to about 10,000 psi (.about.700 bar). The concentrator and separator may consist of a solid-state thin-film heater-adsorber and a channel supported by a solid substrate. The concentrator may have numerous heated interactive elements for adsorbing and desorbing constituents of a sample fluid. The interactive elements may be heated in a time phased sequential manner by heaters. The separator may separate the sample fluid by compound. There may be thermal conductivity detectors, a flow sensor and electrical conductivity detectors proximate to the channels. This system of concentrator, separator, heaters and sensor may provide information about the sample fluid composition. A pump may be connected to the channel to move the sample fluid through it. |
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DETAILED DESCRIPTION What is claimed is: 1.
A fluid analyzer comprising: a concentrator having a first solid-state thin-film heater-adsorber support channel of solid support; a phased heater array proximate to the first solid-state thin-film heater-adsorber support channel; and a separator having a second solid-state thin-film heater-adsorber support channel connected to the first solid-state thin-film heater-adsorber support channel.
2.
The analyzer of claim 1, further comprising a controller connected to the concentrator and the separator.
3.
The analyzer of claim 2, further comprising at least one detector connected to the controller.
4.
The analyzer of claim 3, wherein the first and second solid-state thin-film heater-adsorber support channels are for concentrating and separating a fluid having a pressure greater than 50 psi (.
apprxeq.
3.
5 bar).
5.
The analyzer of claim 4, wherein the first and second solid-state thin-film heater-adsorber support channels are for concentrating and separating a fluid subject to a pressure of up to about 10,000 psi (.
apprxeq.
700 bar).
6.
The analyzer of claim 5, wherein the heater array comprises: a plurality of heaters in a row along a direction of flow of a fluid to be analyzed; and each heater of the plurality of heaters may be turned on sequentially at a rate of movement in a direction equivalent to a flow of a fluid to be analyzed.
7.
The analyzer of claim 6, wherein the first and second solid-state thin-film heater-adsorber support channels have a substrate of a micro-brick structure comprising at least one material from a group of Si, SiO.
sub.
2, glass, quartz, sapphire, steel and the like.
8.
The analyzer of claim 7, wherein the first and second solid-state thin-film heater-adsorber support channels comprise a sufficiently stable, heat resistant and thermally insulating material.
9.
The analyzer of claim 6, wherein the first solid-state thin-film heater-adsorber support channel with segmented heaters is a capillary.
10.
The analyzer of claim 9, wherein the capillary has an inside surface coated with an absorber material
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MEMS 
