Polymer based tunneling sensor

DETAILED DESCRIPTION The present invention includes a process for fabricating a polymer based micro-machine by the following steps.
A mold of a design is formed through a lithography process.
The design is transferred to a polymer substrate through a hot embossing process.
A metal layer is then deposited over at least part of said design and at least one electrical lead is connected to said metal layer.
The invention also includes a polymer based micro-machine having a polymer substrate with a polymer micro-structure formed thereon.
A metal layer is formed over at least part of the micro-structure and at least one electrical lead connected to the metal layer.
The invention further includes a reduced noise tunneling sensor.
The reduced noise tunneling sensor has a first proof mass influencing a first tunneling tip.
There is also a second proof mass having substantially the same mass as the first proof mass and also influencing a second tunneling tip.
An indifference circuit is provided which receives a first signal related to movement of the first proof mass and a second signal related to movement of the second proof mass.
The first and second signals have a useful signal component and a noise component and the indifference circuit subtracts the first and second signals, thereby doubling the useful signal component and eliminating the noise component.