Method of crystallizing amorphous material with a moving energy beam |
| We claim: 1. A method of converting solid amorphous material to a more crystalline state comprising ... |
|
Method for fabricating semiconductor device and method for producing liquid crystal display apparatus |
| A method for fabricating a semiconductor device according to the invention includes the steps of ... |
|
Laser processing method of semiconductor device |
| However, it is very difficult for only the laser annealing to produce a crystalline silicon film ... |
|
Method for producing insulated gate thin film semiconductor device |
| The object of the present invention is to prevent such the deterioration, and to provide a method ... |
|
Transparent solar cell and method of fabrication |
| The present invention provides improved devices such as transparent solar cells and optical filters.... |
|
Laser heat treatment method, laser heat treatment apparatus, and semiconductor device |
| A laser heat treatment method according to one aspect of the present invention comprises the steps ... |
|
Method of manufacturing capacitor in semiconductor devices |
| Accordingly, the present invention is contrived to substantially obviate one or more problems due ... |
|
Micromachined device packaged to reduce stiction |
| It is an object of the present invention to provide methods for reducing stiction of surfaces of a ... |
|
Surface treatment for micromachining |
| According to the present invention a surface treatment for micromachining contains 0.1 to 8 weight ... |
|
Method of drying passivated micromachines by dewetting from a liquid-based process |
| A method of fabricating a micromachine includes the step of constructing a low surface energy film ... |
|
|
Process for microfabrication of an integrated PCR-CE device and products produced by the same
| Details |
Inventors: Mathies, Richard A.; Simpson, Peter C.; Williams, Stephen J.;
Assignee: Affymetrix, Inc. (Santa Clara, CA)
Primary Examiner: Warden; Jill
Assistant Examiner: Starsiak, Jr.; John S.
Attorney, Agent or Firm: Pillsbury Winthrop LLP
A fully integrated monolithic small volume PCR-CE device in glass, or the like materials, is fabricated using thin film metal heaters and thermocouples to thermally cycle sub-microliter PCR volumes. Successful amplification of a PCR fragment is demonstrated on a PCR-CE chip. The process utilizes a linear polyacrylamide surface coating coupled with addition of BSA to the amplification buffer was necessary to obtain amplification efficiencies comparable to a positive control. The micro-reactor reduced significantly the time required for amplification and the reaction volume was in the sub-microlitre regime. Likewise addressed are the known problems connected with reliable microfabrication of metal coatings and the insulating layers required to shield these layers from the PCR reaction mix, and the longstanding unresolved issue of exposed metal regions in the PCR-CE chip resulting in electrolysis of water and bubble formation whenever a voltage is applied. The instant teachings employ external heaters and thermocouples and, as such, have alleviated many of these problems. Heaters and thermocouples may still be thin film deposited after chip bonding allowing for easy scale-up to multichannel devices. In addition, direct deposition of these chip components insures good thermal contact with the PCR reactor. |
|
DETAILED DESCRIPTION A submicroliter PCR type of a reaction chamber is taught for the amplification of specific diagnostic targets using PCR, among other things. Subject amplicons are then directly injected into microfabricated CE channels for fragment size analysis, or use with related biomolecular assays. According to a preferred embodiment, PCR chambers and CE channels are etched into a thickened glass substrate using chemical etching. A thin (for example 0. 20 mm) glass substrate is bonded to the etched surface defining the chambers and channels. The thin substrate utilizes a thermocouple or platinum resistance temperature sensing device on its interior or exterior surface in combination with a platinum or Peltier heater on the external surface for driving thermal cycling. Briefly stated, a fully integrated monolithic small volume PCR-CE device in glass, or the like materials, is fabricated using thin film metal heaters and thermocouples to thermally cycle sub-microliter PCR volumes. Successful amplification of a PCR fragment is demonstrated on a PCR-CE chip. The process utilizes a linear polyacrylamide surface coating coupled with addition of BSA to the amplification buffer to obtain amplification efficiencies comparable to a positive control. The micro-reactor reduces significantly the time required for amplification and the reaction volume within the context of a sub-microlitre regime. Likewise addressed are the known problems connected with reliable microfabrication of metal coatings and the insulating layers required to shield these layers from the PCR reaction itself, and the longstanding unresolved issue of exposed metal regions in the PCR-CE chip resulting in electrolysis of water and bubble formation whenever a voltage is applied. The instant teachings employ external heaters and thermocouples and, as such, have alleviated many of these problems. Heaters and thermocouples may still be thin film deposited after chip bonding allowing for easy scale-up to multichannel devices. In addition, direct deposition of these chip components insures good thermal contact with, for example, a PCR reactor
|
| Related patents |
|
|
Process for manufacturing buried channels and cavities in semiconductor material wafers
The embodiments of the present invention provide a process that eliminates the disadvantages of the known solutions. According to an embodiment of the present invention, ...
|
|
|
Integrated device for microfluid thermoregulation, and manufacturing process thereof
According to the embodiments of the present invention, an integrated device for microfluid thermoregulation and a manufacturing process thereof are provided. The ...
|
|
|
Method of forming pattern
Accordingly, the present invention is directed to a method of forming a pattern that substantially obviates one or more problems due to limitations and disadvantages of ...
|
|
|
Thin film piezoelectric element, method of manufacturing the same, and actuator
The present invention aims to improve the reproducibility of the shape of piezoelectric elements in etching, to prevent failures, e.g. short circuits between the ...
|
|
|
Apparatus for stress relieving liquid crystal displays
What is claimed is: 1. A pressure tolerant liquid crystal device comprising: a first unitary substrate and a second unitary substrate spaced from said first unitary ...
|
|
|
Flat display device
OF THE INVENTION Semitransmission liquid crystal display devices according to preferred embodiments of the present invention will now be described with reference to the ...
|
|
|
Method for making an all-silicon capacitive pressure sensor
It is an object of this invention to provide an improved method for fabricating an all-silicon monolithic capacitive pressure sensor. It is another object of this ...
|
|
|
Microfabricated ultrasonic immersion transducer
It is an object of the present invention to provide an immersion microfabricated ultrasonic transducer. It is a further object of the present invention to provide a ...
|
|
|
Method for making a wafer-pair having sealed chambers
We claim: 1. A method for making a wafer-pair having deposited layer plugged sealed chambers, comprising: growing a thermal layer on a first side of a first silicon ...
|
|
|
Method to produce germanium layers
It is an object of the invention to provide an improved method for producing germanium or other layers of large area. In a first aspect, the present invention provides a ...
|
|
|