Production method for integrated angular speed sensor device

DETAILED DESCRIPTION In one aspect, the present invention provides a motion-sensing device that is a vibrating-type, integrated angular speed sensor and a production method that results in a motion-sensing device at a low cost, and with a high level of performance and reliability.
In one aspect, the integrated angular speed sensor device includes a mobile structure anchored to a semiconductor material body and having first mobile excitation electrodes which are intercalated with first fixed excitation electrodes.
The first mobile and first fixed excitation electrodes have a first direction of extension.
The speed sensor device also includes second mobile detection electrodes which are intercalated with second fixed detection electrodes.
The second mobile and second fixed detection electrodes have a second direction of extension which is substantially perpendicular to said first direction.
In another aspect, the present invention includes a method for production of an integrated angular speed sensor device.
The method includes forming a mobile structure having first mobile excitation electrodes which are intercalated with first fixed excitation electrodes and which extend in a first direction of extension and forming second mobile detection electrodes which are intercalated with second fixed detection electrodes which extend in a second direction of extension which is substantially perpendicular to said first direction.