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MEMS

Surface-acoustic-wave-device-with-a-resistor-thin-film-to-remove-pyroelectric-effect-charges

Semiconductor device

OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will now be explained ...

Optical memory device and a method for manufacturing thereof

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The present invention was carried out to solve these problems. That is, an object of the present ...

Precision spray processes for direct write electronic components

OF THE INVENTION In accordance with the present invention, there are provided methods for direct ...

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OF THE INVENTION A schematic of the preferred embodiment of this invention is given in FIG. 1, ...

Optical memory device and a method for manufacturing thereof

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Integrated circuit structure having a flip-chip mounted photoreceiver

In accordance with the present invention, an IC package structure includes a photoreceiver flip-...

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What is claimed is: 1. An electronic package having contacts adapted to be attached to a substrate, ...

Forming structures from CAD solid models

The present invention pertains generally to a class of material deposition processes that use a ...

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The present invention includes stereolithographically fabricated conductive elements. Accordingly, ...

Surface acoustic wave device with a resistor thin film to remove pyroelectric effect charges

Details

Inventors: Yamada, Yoshihiro; Yamamoto, Yasushi;
Assignee: NEC Corporation (Tokyo, JP)
Primary Examiner: Pascal; Robert
Assistant Examiner: Summons; Barbara
Attorney, Agent or Firm: Scully, Scott, Murphy and Presser

A surface acoustic wave device includes a piezoelectric substrate, an interdigital electrode pattern, and a resistor thin film. The piezoelectric substrate has a piezoelectric effect. The interdigital electrode pattern is made of a conductive thin film and formed on the piezoelectric substrate to perform conversion between an electrical signal and a surface acoustic wave. The resistor thin film is formed on the piezoelectric substrate to electrically connect the piezoelectric substrate to the interdigital electrode pattern. The resistor thin film serves to remove charges from a surface of the piezoelectric substrate due to a pyroelectric effect to the interdigital electrode pattern.

DETAILED DESCRIPTION It is an object of the present invention to provide a surface acoustic wave device in which generation of noise due to the pyroelectric effect of the piezoelectric substrate is suppressed.
In order to achieve the above object, according to the present invention, there is provided a surface acoustic wave device comprising a piezoelectric substrate having a piezoelectric effect, an interdigital electrode pattern made of a conductive thin film and formed on the piezoelectric substrate to perform conversion between an electrical signal and a surface acoustic wave, and a resistor thin film formed on the piezoelectric substrate to electrically connect the piezoelectric substrate to the interdigital electrode pattern, the resistor thin film serving to remove charges from a surface of the piezoelectric substrate due to a pyroelectric effect to the interdigital electrode pattern.

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