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Torsion spring for MEMS structure
| Details |
Inventors: Jeong, Hee-moon;
Assignee: Samsung Electronics Co., Ltd. (Kyungki-do, KR)
Primary Examiner: Zarneke; David
Assistant Examiner: Anya; Igwe U.
Attorney, Agent or Firm: Lee & Morse; P.C.;;
A torsion spring for a MEMS structure has a plurality of beams, each beam having two ends wherein both ends are fixed to a predetermined area, and at least one connection bar disposed at a right angle to a lengthwise direction of the plurality of beams, wherein the at least one connection bar connects the plurality of beams. Preferably, the distance between the connection bars is equal to or greater than the width of one of the plurality of beams. Accordingly, a torsion spring according to the present invention has a bending stiffness greater than a torsional stiffness, which allows easier torsion. Further, a torsion spring according to the present invention may be easily fabricated by etching. |
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DETAILED DESCRIPTION Accordingly, it is a feature of an embodiment of the present invention to provide a torsion spring for a MEMS structure having a bending stiffness that is greater than a torsional stiffness thereof, and which facilitates a simplified fabrication process.
In order to provide the above feature, a torsion spring for a MEMS structure according to an embodiment of the present invention includes a plurality of beams, each beam having two ends wherein both ends are fixed to a predetermined area; and at least one connection bar disposed at a right angle to a lengthwise direction of the plurality of beams, wherein the at least one connection bar connects the plurality of beams.
Preferably, the plurality of beams are parallel.
Also preferably, the pair of beams is a pair of beams.
The pair of beams are preferably connected by a plurality of connection bars disposed at equal intervals.
In one embodiment of the present invention, a connection area formed between the pair of beams and the plurality of connection bars is round.
Preferably, a distance between the plurality of connection bars is equal to, or greater than a width of one of the plurality of beams.
By controlling the distance, a ratio of bending stiffness to torsional stiffness may become greater.
A torsion spring according to the present invention is able to have a bending stiffness that is greater than a torsional stiffness, which allows easier torsion.
Additionally, the torsion spring may be easily fabricated by a single etching process.
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MEMS 
