Aluminum nitride-based sintered body of high thermal conductivity

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT This invention will become more apparent with reference to the following description of the preferred embodiment.
EXAMPLE1 AlN powder having an average particle diameter of 1 micron and containing 3% by weight of oxygen was mixed with 3% by weight of samarium oxide powder having an average particle diameter of 1 micron.
The raw material of the subject AlN-based sintered body was prepared by blending the above-mentioned mixture in a ball mill.
The raw material was subjected to hot pressing for one hour in a carbon die having a diameter of 10 mm with a pressure of 300 kg/cm.
sup.
2 and at a temperature of 1800.
degree.
C.
, thereby manufacturing an AlN-based sintered body.
Control 1 Only AlN powder having an average particle diameter of 1 micron and containing 3% by weight of oxygen was used as the raw material of the AlN-based sintered body.
The raw material was subjected to hot pressing under the same condition as applied in Example 1 to manufacture a AlN-based sintered body.
Control 2 3% by weight of samarium oxide powder having an average particle size of 1 micron was added to AlN powder having an average particle size of 1 micron and containing 20% by weight of oxygen.
The mixture was blended in a ball mill to prepare the raw material of an AlN-based sintered body.
The raw material was subjected to hot press sintering under the same condition as applied in Example 1 to produce an AlN-based sintered body.
The sintered bodies obtained in Example 1 and Controls 1 and 2 were thinned to a thickness of about 3.
5 mm.
The thermal conductivities of these sintered bodies were measured at room temperature by the laser flash method.
The AlN-based sintered body of Example 1 indicated a thermal conductivity of 65 W/m.
multidot.
K.
The AlN-based sintered body of Control 1 showed a thermal conductivity of 35 W/m.
multidot.
K.
The AlN-based sintered body of Control 2 had a thermal conductivity of 32 W/m.
multidot.
K.
According to an X-ray diffraction phase determination, the AlN phase and the perovskite phase alone were detected in the AlN-based sintered body of Example 1