Integrated variable focal length lens and its applications

DETAILED DESCRIPTION According to the teachings of the invention, there is provided a variable focal length lens integrated on a semiconductor substrate.
The lens contains a fixed volume of a light transmitting material such as gas or fluid, in the cavity in the substrate.
The material when heated or cooled deflects a light transmitting flexible wall or thin membrane forming one or more walls of the cavity.
The wall or membrane provides a surface of the lens, and the deflection of the wall or membrane changes the focal length of the lens.
The lens is suitable for use in temperature and pressure sensors, fiber optic communication networks, optical computers, and other applications.
A better understanding of the different types of structures which can be made in accordance with the teachings of the invention and the different methods of making these structures may be had by reference to the drawings herein for which a brief description of the drawings follows.