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Microvalve
| Details |
Inventors: Gschwendtner, Horst; Marek, Jiri; Mettner, Michael; Stokmaier, Gerhard; Grauer, Thomas;
Assignee: Robert Bosch GmbH (Stuttgart, DE)
Primary Examiner: Michalsky; Gerald A.
Assistant Examiner:
Attorney, Agent or Firm: Frishauf, Holtz, Goodman & Woodward
A microminiature valve in multi-layered structure for switching or controlling fluid flows is proposed, having an inlet and a closing element. The inlet is embodied in a first layer in the form of at least one through-opening. The closing element is structured out of a second layer which is applied on the first layer. This second layer has at least one further through-opening in the area of the closing element. The closing element is displaceable by actuation means, in particular electrical ones, essentially parallel to the first layer and the second layer, so that in at least one first position of the closing element the at least one through-opening of the inlet, together with the at least one further through-opening in the second layer, forms at least one flow-through opening. The cross section of the at least one flow-through opening can be varied by actuating the closing element. |
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DETAILED DESCRIPTION Sections of a microminiature valve constructed in layers and having an inlet and a closing element are shown in FIG.
1.
The flow-through direction of the fluid flow to be switched or controlled is indicated by the arrow 1.
The arrow 2 symbolizes the direction of displacement of the closing element.
The structure of the microminiature valve substantially has a first layer 25 and a second layer 15 placed thereon.
A fixed grid structure 20 with grid beams 23 forming holes 24 is structured in a frame 21 in the first layer 25.
A second grid structure 10, also having grid beams 13 and holes 14, is formed analogously to the first grid structure 20 in the second layer 15.
The frame 11 of the second grid structure 10 is connected with the second layer 15 via resilient beams 12.
The resilient beams 12 are embodied considerably narrower than tall, so that bending in a lateral direction 2 takes place preferably to bending perpendicularly to the planes of the layers.
There is a fine gap between the first layer 25 and the second layer 15 in the area of the grid structures 10, 20, the frames 11, 21 and the resilient beams 12.
By means of this it is possible to displace the second grid structure 10, which forms the closing element, in the frame 11 laterally, i.
e.
parallel to the layers 15 and 25 forming the microminiature valve, because of which the size of the flow-through opening formed by the overlapping holes 14, 24 of the first and second grid structures 10, 20 can be changed.
The first grid structure 20 is used as inlet, the second grid structure 10 as closing element and outlet of the microminiature valve.
The inlet of the valve is separated from the outlet of the valve.
In the exemplary embodiment shown in FIG.
1, actuation of the closing element is effected via interspersed comb-shaped lamella structures 32 and 33, between which a voltage can be applied.
One of the interspersed comb-shaped lamella structures 32 extends from the frame 11 of the grid structure 10 forming the closing element
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