 Coaxial microwave applicator for an electron cyclotron resonance plasma source |
| It is therefore an object of the present invention to provide a method and apparatus for producing ... |
|
| Aqueous magnetorheological material |
| OF THE INVENTION The compositions form a thixotropic network that is effective at minimizing ... |
|
| Process for forming a contact structure |
| We claim: 1. A process for forming a contact in a multi-layer semiconductor device, comprising the ... |
|
| Method of forming studs and interconnects in a multi-layered semiconductor device |
| The present invention overcomes the disadvantages associated with the prior art methods of forming ... |
|
| Ohmic electrode, its fabricating method and semiconductor device |
| It is therefore a first object of the invention to provide an ohmic electrode for GaAs ... |
|
| Method for joining heat-recoverable sheet material and resulting article |
| According to the present invention, the ends of heat-recoverable sheet material are joined by ... |
|
| Cured pressure sensitive adhesives |
| What is claimed is: 1. Process for the preparation of an adhesive layer on a substrate which ... |
|
| Recoverable article for encapsulation |
| We claim: 1. A dimensionally heat-recoverable article comprising a composite structure of a heat-... |
|
|
Block polymer compositions
| Details |
Inventors: Crivello, James V.;
Assignee: General Electric Company (Schenectady, NY)
Primary Examiner: Briggs, Sr.; Wilbert J.
Assistant Examiner: Woodward; D. W.
Attorney, Agent or Firm: Teoli; William A., Davis, Jr.; James C., Magee, Jr.; James
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis. |
|
DETAILED DESCRIPTION What I claim as new and desire to secure by Letters Patent of the United States is: 1.
A composition comprising (A) a silicone-organic block polymer resulting from the free-radical polymerization in the presence of organic solvent of a free radical polymerizable organic monomer of the formula ##STR12## and a silicone prepolymer consisting essentially of chemically combined diorganosiloxy units and having in its backbone or in the terminal position, at least one chemically combined bissilyl pinacolate radical capable of forming a free-radical initiator upon thermolysis, and (B) an amount of a decomposable aryl onium salt having at least one chemically combined onium anion which is effective for producing the acid catalyzed chemical transformation of the silicone-organic block polymer sufficient to alter its solubility characteristics when exposed to electromagnetic or particle radiation, where R is selected from hydrogen, a C.
sub.
(1-8) alkyl radical, or a mixture thereof, R.
sup.
1 is a C.
sub.
(1-14) monovalent hydrocarbon radical or hydrocarbon radical substituted with radicals, neutral during polymerization, Q is a monovalent radical selected from --CO.
sub.
2 --Y, --R.
sup.
2 CO.
sub.
2 Y, and R.
sup.
2 OZ, Y and Z are acid labile radicals, and R.
sup.
2 is selected from C.
sub.
(6-14) aromatic hydrocarbon radicals and C.
sub.
(6-14) aromatic hydrocarbon radicals substituted with up to five nuclear bound radicals which can be the same or different and neutral during free radical polymerization.
2.
A composition in accordance with claim 1, where the aryl onium salt is a diaryliodonium salt having an anion selected from hexafluoroarsenate, trifluoromethanesulfonate, hexafluoroantimonate, or hexafluorophosphate.
3.
A composition in accordance with claim 1, where the aryl onium salt is a triarylsulfonium salt having an anion selected from hexafluoroarsenate, trifluoromethanesulfonate, fluoroborate, hexafluoroantimonate, or hexafluorophosphate.
4.
A composition in accordance with claim 1 where the free radical polymerizable organic monomer is 4-t-butoxystyrene
|
|
Nonmetallic Processes 
