Carrier for cleaning and etching wafers

DETAILED DESCRIPTION This invention seaks to solve the above problems of the prior art systems.
Accordingly, an object of this invention is to make it possible to conduct, in a correct and automated fashion each step of a wafer cleaning and etching process or treatment.
To achieve the above object of this invention, the characteristic feature of a carrier for supporting a single lot of prescribed sheets of semiconductor wafers according to this invention resides in that the carrier is combined with an information member which contains a semiconductor chip constituting a microcomputer or a microprocessor and memory.
Accordingly, in one aspect of this invention, there is provided a carrier for supporting a single lot of prescribed sheets of semiconductor wafers so as to transfer the single lot of prescribed sheets of semiconductor wafers from one processing step to another processing step in their cleaning and etching processing.
The carrier or its container includes an information member holder and an information member detachably supported by the holder.
The information member includes a semiconductor chip which constitutes a microprocessor and memory.
According to this invention, a wafer carrier is provided with an information member, whereby enabling to perform the automation and control of each cleaning or etching step of wafers.
Therefore, the carrier according to this invention can bring about numerous merits, including: (a) Each processing or treatment apparatus is instructed by the information member and no instruction error will thus arise; (b) The completion of each processing or treatment step and other information pertaining the step are all stored in the memory, thereby facilitating correct collation; (c) The operator is only required at each processing or treatment step to take out and slip in the information member which may be in the form of an information card or the like, and the handling of the informaton member is extremely easy owing to its compactness; (d) The problem of rubbish can be completely solved because the main body of the information member may be made of a synthetic resin; (e) The information member permits free writing-in of problems and the like which may occur in each step; and (f) Key punching machines or terminal equipment for punched cards, are not required any longer