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Nonmetallic Processes

Conveyor-means-for-wafers

Volumetric fluid dispensing apparatus and method

OF THE INVENTION Referring now to the drawings, and more particularly to FIG. 1, the dispensing ...

Process chamber purge module for semiconductor processing equipment

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Photographic coupler compositions containing ballasted alcohols and methods

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Device for cleaning, testing and sorting of workpieces

I claim: 1. Device for treating by cleaning, testing and sorting substrates comprising: at least ...

Device and method for scrubbing and cleaning substrate

An object of the present invention is therefore to provide a scrubbing and cleaning device, more ...

Cleaning apparatus for cleaning reverse surface of semiconductor wafer

It is the object of the invention to provide a cleaning apparatus capable of cleaning the reverse ...

Apparatus for spraying at a spraying station aligned with a continuously moving conveyor belt

We claim: 1. Apparatus for applying a coating to a vessel, said apparatus including a continuously ...

Apparatus for treating semiconductor wafers

What is claimed is: 1. Apparatus for treating semiconductor wafers comprising a reciprocating wafer ...

Conveyor means for wafers

Details

Inventors: Fukuwatari, Ichiro; Watanabe, Seiji;
Assignee:
Primary Examiner: Kashnikow; Andres
Assistant Examiner: Trainor; Christopher G.
Attorney, Agent or Firm: Wenderoth, Lind & Ponack

A conveyor for use in a room with a high degree of cleanness and which can convey wafers one by one stably, without generation of dust. The conveyor has vehicles having a slit in the surface on which a wafer can be placed, permanent magnets provided on the undersurface of the vehicle, and a magnetic fluid interposed between the permanent magnets and a transporting course for floating the vehicle. By moving the vehicle along the transporting course by linear motors or by driving devices of the rope trolley type, wafers are conveyed one by one on the vehicle.

DETAILED DESCRIPTION The present invention is a simple means of conveying wafers one by one both stably and free from generation of dust.
This conveyor means can safely be used in a clean room with a high degree of cleanness.
It comprises vehicles having a slit in the surface on which the wafer is placed, a permanent magnet provided at the undersurface of the vehicle, and a magnetic fluid interposed between the permanent magnet and the transporting path for floating a vehicle.
By moving the vehicle along the transporting path by a linear motor or by a driving device of the rope trolley type, wafers are conveyed one by one along the path.

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