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Dry developable positive photoresists
| Details |
Inventors: Meyer, Wolfgang H.; Curtis, Bernard J.;
Assignee: RCA Corporation (New York, NY)
Primary Examiner: Kittle; John E.
Assistant Examiner: Hamilton; Cynthia
Attorney, Agent or Firm: Morris; Birgit E., Swope; R. Hain
Novel copolymers comprising a compound containing an acrylate moiety and a silicon-containing oxime ester of methacrylic acid having the formula ##STR1## are positive resist recording media which can be dry developed. |
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DETAILED DESCRIPTION OF THE INVENTION The novel copolymers of this invention are copolymers of certain compounds containing an acrylate moiety and a silicon-containing oxime ester of methacrylic acid.
In terms of mole percentage, the copolymers of this invention contain the acrylate moiety-containing compound and the oxime in a molar ratio of from about 1:10 to 10:1, preferably from about 1:1 to about 3:1.
In accordance with this invention, the monomers containing an acrylate moiety, i.
e.
the chemical group represented by the formula ##STR2## wherein R is hydrogen or methyl include acrylic acid, methacrylic acid and their esters.
Preferred esters are alkyl esters, particularly lower alkyl esters wherein the group contains from 1 to 6 carbon atoms such as, for example, methyl methacrylate, ethyl methacrylate and the like.
The silicon-containing oxime ester of methacrylic acid, referred to hereinafter by the designation "SOMA", is 4-(trimethylsilylmethylene)acetophenoneoxime methacrylate, having the structural formula ##STR3## SOMA, which is a novel compound, may be prepared by reacting methacryloyl chloride with 4-(trimethylsilylmethylene)acetophenoneoxime in the cold in the presence of a base, preferably an organic base.
The starting material utilized to prepare SOMA, 4-(trimethylsilylmethylene)acetophenoneoxime, and its preparation are disclosed by Petrov et al.
Dokl.
Akad.
Nauk.
S.
S.
S.
R.
, 100, pp.
929-932 (1955).
This compound is prepared conventionally from the corresponding acetophenone which is, in turn, prepared by conventional acylation from trimethylbenzylsilane according to the reaction ##STR4## The novel copolymers of this invention can be prepared by free radical polymerization in the presence of a conventional polymerization initiator such as dibenzoylperoxide, t-butylhydroperoxide or the like.
The molecular weight of the copolymer can be controlled by the amount of the polymerization initiator being present, with increased amounts giving lower molecular weights and vice versa
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