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Gel-coated microcapsules
OF THE INVENTION The coated microcapsules of the invention feature microcapsules coated with a gel, specifically a gel produced by the sol-gel process. The gel coating ...
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Porous silicon dioxide insulator
Parasitic capacitance is reduced in a semiconductor integrated circuit (IC) by forming a porous silicon dioxide insulator between at least one interconnect and other ...
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Method for forming porous silicon dioxide insulators and related structures
Parasitic capacitance is reduced in a semiconductor integrated circuit (IC) by forming a porous silicon dioxide insulator between at least one interconnect and other ...
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Method for making surfactant-templated, high-porosity thin films
OF THE INVENTION The present invention provides a method to prepare high-porosity, mesophase structures and subsequent thin films with controlled pore structure and ...
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Method of making fullerene-decorated nanoparticles and their use as a low dielectric constant material for semiconductor devices
The limitations of the prior art discussed above have, as of yet, not allowed the use of porous materials in semiconductor devices. Several of these limitations are ...
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Porous silicon oxycarbide integrated circuit insulator
The present invention provides, among other things, a low dielectric constant IC insulator formed of porous silicon oxycarbide. In one embodiment, the invention includes ...
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Method of forming porous film and material for porous film
In view of the aforementioned conventional problems, an object of the invention is providing a method, as simple as the conventional SOG process, of forming a porous ...
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Porous materials
OF THE INVENTION As used throughout this specification, the following abbreviations shall have the following meanings, unless the context clearly indicates otherwise: ....
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Process for producing nanoporous dielectric films at high pH
OF THE PREFERRED EMBODIMENT The invention forms a reaction product of at least one alkoxysilane with a relatively high volatility solvent composition, a relatively low ...
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Process for producing dielectric thin films
The invention provides a process for producing a cured dielectric film on a substrate which comprises depositing a nanoporous silica dielectric precursor onto a ...
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