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Handler used in testing system for semiconductor devices
| Details |
Inventors: Sekiba, Takashi;
Assignee: Fujitsu Miyagi Electronics Limited (Miyagi, JP)
Primary Examiner: Nguyen; Vinh
Assistant Examiner:
Attorney, Agent or Firm: Armstrong, Nikaido, Marmelstein, Kubovcik & Murray
A handler used in a testing system for semiconductors includes an arm shaped conveyer unit for conveying a semiconductor device from a first end thereof to a second end thereof and vice versa,a loader/unloader unit which is provided at the first end of the conveyer unit, a setting unit which is provided at the second end of the conveyer unit, and an adjusting unit for adjusting the setting unit on a testing position which is a predetermined position with respect to a test head. The conveyer unit includes a ring shaped conveyer belt which is rotated between the first end of the conveyer unit and the second end thereof, and a plurality of holders each of which is fixed on an outer surface of the conveyer belt and holds the semiconductor device. The loader/unloader unit includes a first tray for storing a non-tested semiconductor device, a second tray for storing a tested semiconductor device, and a moving mechanism for moving the non-tested semiconductor device from the first tray to the conveyer unit and for moving the tested semiconductor device, which has been conveyed by the conveyer unit to the first end thereof, from the conveyer unit to the second tray. The setting unit includes a mechanism for setting the non-tested semiconductor device on the test head and for returning the tested semiconductor device from the test head to the conveyer unit, the conveyer unit then conveying the tested semiconductor device from the second end thereof to the first end thereof. |
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DETAILED DESCRIPTION What is claimed is: 1.
A handler for supplying a semiconductor device to a test head which is separated from said handler and used to measure an electrical characteristic of the semiconductor device and for receiving a semiconductor device whose electrical characteristic has been measured by said test head, said handler comprising: an arm shaped conveyer unit for conveying a semiconductor device from a first end thereof to a second end thereof and vice versa; a loader/unloader unit which is provided at the first end of said conveyer unit; a setting unit which is provided at the second end of said conveyer unit; and an adjusting unit for adjusting said setting unit on a testing position which is a predetermined position with respect to said test head, wherein said conveyer unit comprises a ring shaped conveyer belt which is rotated between the first end of said conveyer unit and the second end thereof, and a plurality of holders each of which is fixed on an outer surface of said conveyer belt and holds the semiconductor device, so that each of said holders is circulated between the first end of said conveyer unit and the second end thereof by a rotation of said conveyer belt, wherein said loader/unloader unit comprises first storage means for storing a non-tested semiconductor device which is a semiconductor device whose electrical characteristic has not been measured by said test head yet, second storage means for storing a tested semiconductor device which is a semiconductor device whose electrical characteristic has been measured by said test head, and moving means for moving the non-tested semiconductor device from said first storage means to said conveyer unit and for moving the tested semiconductor device, which has been conveyed by said conveyer unit to the first end thereof, from said conveyer unit to said second storage means, and wherein said setting unit comprises means for setting the non-tested semiconductor device which is conveyed by said conveyer unit to the second end thereof on said test head and for returning the tested semiconductor device from said test head to said conveyer unit, said conveyer unit then conveying the tested semiconductor device from the second end thereof to the first end thereof
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Nonmetallic Processes 
