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Optical projection and scanning apparatus
We claim: 1. Apparatus for photographically exposing an image-receiving surface to a light image of an object, said apparatus comprising: an optical system having an ...
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Photolithographic projection apparatus using light in the far ultraviolet
In accordance with the principles of the present invention, a photolithographic image projection apparatus, effective to project radiation from an object plane onto an ...
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Pattern generator part holder
OF THE PRESENT INVENTION A part holder used in conjunction with a pattern generation device which allows accurate referencing of a work piece mounted on the part holder ...
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Method of making high transconductance heterostructure field effect transistor
Briefly stated, the present invention creates a high transconductance HFET that utilizes non-alloy semiconductor materials to form a strained channel layer that has a ...
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Semiconductor integrated circuit with dummy patterns
It is an object of the present invention to provide semiconductor integrated circuit device having a flat insulating layer formed on a lower interconnection layer and ...
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Infrared moisture measuring apparatus
One object of my invention is to provide a moisture measuring apparatus which may be used to measure moisture in a rapidly moving web. Another object of my invention is ...
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Exposure apparatus
It is an object of the present invention to provide an exposure apparatus capable of detecting a rotational displacement in a short period of time with a high degree of ...
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Optical alignment system for use in photolithography and having reduced reflectance errors
OF THE INVENTION The task of producing integrated circuits, such as for LCD's, often requires the fabrication of a sandwich of electronically active layers. These ...
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Optical system control mechanism
OF THE PREFERRED EMBODIMENTS Other features of this invention will become apparent in the course of the following description of an exemplary embodiment which is given ...
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Apparatus and method for determination of wavelength
OF THE PREFERRED EMBODIMENT FIG. 1 illustrates a block diagramatic view of the wavelength measuring apparatus. The apparatus is utilized to determine the wavelength of ...
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