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Paired electrodes for plasma chambers
| Details |
Inventors: Fazlin, Fazal A.;
Assignee: Advanced Plasma Systems Inc. (St. Petersburg, FL)
Primary Examiner: Niebling; John F.
Assistant Examiner: Chapman; Terryence
Attorney, Agent or Firm: Stein, Reese & Prescott
A paired electrode for use in a plasma chamber. In one embodiment, the paired electrode comprises a plurality of angle members which are disposed parallel to one another. Pairs of the angle members are positioned facing one another, one functioning as a power electrode member and the other as a ground electrode member. All of the power electrode members are rigidly fastened to one another by means of a transverse power bus and all of the ground electrode members are rigidly fastened to one another by means of a transverse ground bus. The power bus and the ground bus are electrically connected to a power source, usually a RF power source and a ground of the plasma chamber, respectively. The plasma chamber contains a plurality of paired electrodes, and objects to be processed by plasma are placed between the paired electrodes. |
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DETAILED DESCRIPTION The invention is defined by the appended claims with a specific embodiment shown in the attached drawings.
For the purpose of summarizing the invention, the invention comprises a unique paired electrode for use in conjunction with plasma chambers.
In one embodiment, the paired electrodes of the invention comprises a plurality of angle members which are disposed parallel to one another.
Every two of the angle members are positioned facing one another, one functioning as a power electrode member and the other as a ground electrode member.
All of the power electrode members and all of the ground electrode members are rigidly fastened to one another by means of a transverse power bus and a transverse ground bus, respectively.
The power bus and the ground bus are then, respectively, electrically connected to the power, usually RF, and the ground of the plasma chamber.
In the other embodiment, the paired electrodes of the invention comprise a "Z" cross-sectional configuration which are positioned in facing relationship with one another by means of stand-offs and which are electrically connected to the power and ground of the plasma chambers by means of the transverse power and the transverse ground buses.
In both of the embodiments, a plurality of the electrode pairs are fastened together in the conventional form by means of longitudinal power and longitudinal ground bus bars interconnecting the power and ground buses of the electrode pairs.
The resulting electrode pair assembly is then inserted within the plasma chamber for use.
During use, the objects to be treated, such as printed circuit boards, are inserted into the areas between adjoining electrode pairs.
The lid to the chamber is closed and then gas is introduced.
As the gas flows from one end of the chamber to the other, the gas weaves through the opposing power and ground electrode members of each electrode pair, is exposed to a primary electric field, and is therefore excited to a plasma state.
As the gas continues to flow through or about the object toward the other adjoining electrode pair, the gas is maintained in its excited state by means of the existing secondary electric field between the adjoining electrode pairs
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Nonmetallic Processes 
