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Spin coating apparatus with an independently spinning enclosure
| Details |
Inventors: Swain, Danny C.;
Assignee:
Primary Examiner: Jones; W. Gary
Assistant Examiner: Burns; Todd J.
Attorney, Agent or Firm: Hughes; Michael J.
An improved spin coating apparatus (10) having a spin tub (28) surrounding a chuck (14), the chuck (14) being adapted for hold a workpiece (16) for coating. The chuck (14) and the spin tub (28) are spun coaxially and independently such that the chuck (14) may be stopped while the spin tub (28) remains spinning. The spin tub (28) defines a frustum of a cone with a plurality of outlet slots (60) distributed at a large end (52) thereof such that centrifugal force will direct contaminants out of the spin tub (28) through the outlet slots (60). A plurality of fan vanes (62) create an air stream (88) through the spin tub (28) which pulls contaminants through the outlet slots (60) and into a plenum chamber (72) where they are expelled therefrom through a vent tube (64). |
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DETAILED DESCRIPTION I claim: 1.
An improved spin coating device for applying a fluid coating to a workpiece, comprising: a housing; a chuck for holding the workpiece, said chuck being rigidly affixed to a chuck shaft, the chuck shaft being rotatably attached to said housing such that said chuck and the workpiece can be spun about the chuck shaft in relation to said housing; a chuck rotating means for causing said chuck to spin; a spin tub at least partially surrounding said chuck, said spin tub being rigidly affixed to a spin tub shaft, the spin tub shaft being coaxial with the chuck shaft and free to spin independently of the chuck shaft; and a spin tub rotating means for causing said spin tub to spin.
2.
The improved spin coating device of claim 1, wherein: said spin tub has a small end through which the workpiece may be inserted and removed and a large end opposite the small end, the large end being enclosed by a spin tub end portion, the spin tub end portion being affixed at its center to the spin tub shaft.
3.
The improved spin coating device of claim 2, and further including: a plurality of outlet openings, the outlet openings being apertures in said spin tub adjacent to the end portion of said spin tub.
4.
The improved spin coating device of claim 3, and further including: a plurality of fan vanes distributed about the exterior of said spin tub and protruding therefrom, such that air is forced away from said spin tub as said spin tub is caused to spin by the spin tub rotating means.
5.
The improved spin coating device of claim 3, wherein: each of the outlet openings has associated therewith and adjacent thereto a, fan vane, the fan vane protruding generally radially outward from said spin tub and preceding the outlet opening as said spin tub rotates such that a partial vacuum is created behind the fan vanes which helps to draw air from the interior of said spin tub out through the outlet openings.
6.
The improved spin coating device of claim 4, and further including: a chamber defined by said housing, said spin tub, and an enclosure ring, the enclosure ring projecting inward from said housing and closely fitting about said spin tub to complete the enclosure of the chamber, the outlet openings being within the enclosure such that fluid and air drawn from within the spin tub are expelled into the enclosure
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