|
|
Wafer transfer system
What is claimed is: 1. In a wafer transfer system including automatic robot claws and a susceptor having circularly bounded and round-bottomed concavities for receiving ...
|
|
|
Mail tracker with zip break marker
OF THE INVENTION FIG. 1 is a generalized diagrammatic illustration of a specific embodiment of a document handling system 10 for handling mail piece documents and the ...
|
|
|
Volumetric fluid dispensing apparatus and method
OF THE INVENTION Referring now to the drawings, and more particularly to FIG. 1, the dispensing apparatus of the present invention is shown therein and indicated ...
|
|
|
Process chamber purge module for semiconductor processing equipment
The system and method of the present invention provide inventive subject matter to overcome the problems and satisfy the needs already mentioned. The present invention ...
|
|
|
Resist developing apparatus
The object of the present invention is to provide a resist developing apparatus which permits accurate and reliable control of the temperature of a developing chamber ...
|
|
|
System and method for applying a liquid
It is accordingly an object of the present invention to provide a system and a method for applying a liquid, the system having a nozzle capable of uniformly supplying ...
|
|
|
Photographic coupler compositions containing ballasted alcohols and methods
The photographic coupler compositions of the present invention comprise a dye-forming coupler, preferably a magenta dye-forming coupler, and an alcohol in an amount ...
|
|
|
Device for cleaning, testing and sorting of workpieces
I claim: 1. Device for treating by cleaning, testing and sorting substrates comprising: at least one substrate holder for a substrate to be treated; a machine support ...
|
|
|
Device and method for scrubbing and cleaning substrate
An object of the present invention is therefore to provide a scrubbing and cleaning device, more functional and more compact, but capable of scrubbing substrates such as ...
|
|
|
Cleaning apparatus for cleaning reverse surface of semiconductor wafer
It is the object of the invention to provide a cleaning apparatus capable of cleaning the reverse surface of a semiconductor wafer without spinning the wafer. Here, the "...
|
Nonmetallic Processes 
