Device and method for scrubbing and cleaning substrate
An object of the present invention is therefore to provide a scrubbing and cleaning device, more functional and more compact, but capable of scrubbing substrates such as LCD ones each having a large a... Read More
Inventors: Tanoue, Kouichi; Kitamura, Shinzi; Anai, Noriyuki; Satoh, Takami; Tomoeda, Takayuki; Iwasaki, Tatsuya; Mizosaki, Kengo;, Assignee: Tokyo Electron Limited (Tokyo, JP); Tokyo Electron Kyushu Limited (Tosu, JP) |
Cleaning apparatus for cleaning reverse surface of semiconductor wafer
It is the object of the invention to provide a cleaning apparatus capable of cleaning the reverse surface of a semiconductor wafer without spinning the wafer. Here, the "reverse surface" is the surfac... Read More
Inventors: Akimoto, Masami;, Assignee: Tokyo Electron Limited (Tokyo, JP); Tokyo Electron Kyushu Limited (Tosu, JP) |
Apparatus for spraying at a spraying station aligned with a continuously moving conveyor belt
We claim: 1. Apparatus for applying a coating to a vessel, said apparatus including a continuously operating conveyor which conveys a vessel to be coated to a spraying station vertically aligned with ... Read More
Inventors: Pietrowski, Michael L.; Norlin, Gordon D.; Mohr, Thomas J.; Williams, Charles R.; Haug, Thomas J.; Herrmann, John W.;, Assignee: Anchor Hocking Corporation (Freeport, IL) |
Apparatus for treating semiconductor wafers
What is claimed is: 1. Apparatus for treating semiconductor wafers comprising a reciprocating wafer tray having at least three wafer carrying apertures, at least a pair of operating apertures each one... Read More
Inventors: Wills, James C.; Spenser, Douglas S.;, Assignee: Solitec, Inc. (Santa Clara, CA) |
Spin coating apparatus with an independently spinning enclosure
I claim: 1. An improved spin coating device for applying a fluid coating to a workpiece, comprising: a housing; a chuck for holding the workpiece, said chuck being rigidly affixed to a chuck shaft, th... Read More
Inventors: Swain, Danny C.;, Assignee: |
Apparatus for applying hot melt glue to round and non-round containers
OF THE DRAWINGS The objects and features of the invention noted above are explained in more detail with reference to the drawings, in which like reference numerals denote like elements, and in which:... Read More
Inventors: Schneider, Wayne F.;, Assignee: Sealright, Co., Inc. (Desoto, KS) |
Penis prosthesis
An object of the present invention is therefore to provide an implantable penis prosthesis in the form of a flexible rod member which permits the operator to adapt it in respect of length and/or diame... Read More
Inventors: Koss, Walter;, Assignee: |
Process for controlling mobile ion contamination in semiconductor devices
In the present invention the disadvantages of the phoso-silicate glass are avoided by forming a dielectric layer, typically silicon dioxide, by any desired means and then ion implanting therein a mate... Read More
Inventors: Finn, Chris J.; Youngner, Daniel W.;, Assignee: Honeywell Inc. (Minneapolis, MN) |
Azeotrope-like compositions of tertiary butyl 2,2,2-trifluoroethyl ether and perfluoromethylcyclohexane
OF THE INVENTION In accordance with the invention, novel azeotrope-like compositions have been discovered comprising tertiary butyl 2,2,2-trifluoroethyl ether and perfluoromethylcyclohexane. Preferab... Read More
Inventors: Van Der Puy, Michael;, Assignee: Allied-Signal Inc. (Morris Township, NJ) |
Method for developing negative photoresists
OF THE INVENTION The process of the invention for developing exposed negative photoresists on substrates comprises treating the photoresist with a mixture comprising trichloroethane and from about 5 ... Read More
Inventors: Anschel, Morris; Goodrich, Lawrence D.; Hetrick, Barton M.;, Assignee: International Business Machines Corporation (Armonk, NY) |
Method of fabricating SOI wafer with SiGe as an etchback film in a BESOI process
The present invention relates generally to silicon on insulator (SOI) wafers and more specifically to a new method and resulting structure for producing SOI wafers. Prior art processings for producing... Read More
Inventors: Gaul, Stephen J.; Rouse, George V.;, Assignee: Harris Corporation (Melbourne, FL) |
Phthalaldehyde adduct and imaging compositions, elements and methods incorporating same
What is claimed is: 1. In an unexposed imaging composition comprising a source of phthalaldehyde and an energy-activatible material capable of generating an amine that reacts with said phthaladehyde t... Read More
Inventors: DoMinh, Thap; Stern, Max H.;, Assignee: Eastman Kodak Company (Rochester, NY) |
Method of making integrated CMOS and CTD by selective implantation
I claim: 1. A method of fabricating a semiconductor device comprising: (a) providing a semiconductor substrate containing one impurity polarity type, having a silicon nitride mask over its upper surfa... Read More
Inventors: Aitken, Alan;, Assignee: Mitel Corporation (Kanata, CA) |
Semiconductor device having a well electrically insulated from the substrate
Accordingly, the object of the present invention is to provide a semiconductor device that has an excellent crystal quality in the device active layer so that highly reliable microdevices can be forme... Read More
Inventors: Matsushita, Yoshiaki;, Assignee: Kabushiki Kaisha Toshiba (Kawasaki, JP) |
Keyboard switch
The present invention relates to improvements in pushbutton switches. One purpose of the present invention is a pushbutton switch of the type shown in the above-mentioned copending application includi... Read More
Inventors: Golbeck, Bernard J.; Lewandowski, Raymond F.; Markinson, William C.;, Assignee: Oak Industries Inc. (Crystal Lake, IL) |
Megasonic jet cleaner apparatus
OF A PREFERRED EMBODIMENT As seen in FIG. 1, the nozzle assembly 10 (to be described) is positioned to develop a fluid jet 12 for projection in a direction preferably perpendicular to the surface 14 ... Read More
Inventors: Hall, William B.;, Assignee: RCA Corporation (New York, NY) |
Apparatus for cleaning semiconductor wafers
Briefly, the apparatus of the present invention operates to clean semiconductor wafers by the application of ultrasonic energy uniformly over the wafer's entire surface. To this end, a transducer asse... Read More
Inventors: Lawson, Robert M.;, Assignee: GCA Corporation (Bedford, MA) |
Carrier for cleaning and etching wafers
This invention seaks to solve the above problems of the prior art systems. Accordingly, an object of this invention is to make it possible to conduct, in a correct and automated fashion each step of a... Read More
Inventors: Aigo, Seiichiro;, Assignee: |
Composite compositions from graft polymerized rigid fillers
OF THE INVENTION In prior art methods of preparing filled thermoplastics, the thermoplastic matrix and the filler (either ungrafted or graft polymerized with a small amount of polymer to improve comp... Read More
Inventors: Bagley, Edward B.; Fanta, George F.; Doane, William M.; Gugliemelli, Lewis A.; Russell, Charles R.;, Assignee: The United States of America as represented by the Secretary of (Washington, DC) |
Prefabrication system for building walls
In the prefabrication system for building walls, according to the invention, provision is made for pairs of shell-shaped or panel-shaped symmetrical elements, having stiffening ribs and lightening dep... Read More
Inventors: Longinotti, Enrico;, Assignee: |
Light weight tear resistant fabric
The invention provides a light weight tear resistant fabric composed of a background fabric and meta-aramid reinforcing continuous filament yarn of comparable denier. The meta-aramid reinforcing yarn ... Read More
Inventors: Shaffer, Donald E.;, Assignee: E. I. Du Pont de Nemours and Company (Wilmington, DE) |
Concealed grid ceiling panel system
A ceiling system, according to an aspect of the present invention, comprises ceiling panels designed to abut adjacent ceiling panels and collectively define a concealed grid ceiling panel system. A `T... Read More
Inventors: Wilson, Wm. S.; Kolga, Heikki; White, Ronald G.;, Assignee: Decoustics Limited (Etobicoke, CA) |
Method of making a foamed polystyrene building panel
The building panels 10 and 11, made in accordance with this invention are shown in juxtaposition at the building site. Each panel 10 and 11 includes a plurality of frame members 12 that are integrall... Read More
Inventors: Hurst, Aubrey J.;, Assignee: |
Enclosed structure and method of construction
It is an object of the invention to provide an enclosed structure suitable for containing particulate solids and a method of construction which will overcome, or at least ameliorate, the above disabil... Read More
Inventors: Moore, John V.;, Assignee: |
Masonry veneer wall anchor
According to the present invention, an anchor is formed of an integral metal form which is preformed as an L-shaped bar such as an angle iron so that an outstanding leg of the anchor may be disposed i... Read More
Inventors: Allan, Jack A.;, Assignee: AA Wire Products Company (Chicago, IL) |
Web applicator
The present invention provides an applicator adapted for use with an automatically controlled mechanism such as a robotically driven arm for applying a length of a web to a surface. The web may compri... Read More
Inventors: Luhman, Robert A.; Tarbutton, Kent S.; Shvartsman, Rudolf I.; Geisel, Donald J.; Pilarski, Richard J.;, Assignee: Minnesota Mining and Manufacturing Company (St. Paul, MN) |
Device for adjusting the distance between a glue applying roll and a web leading roll
An object of the present invention is to provide a device for a fine adjustment of the distance between the glue applying roll and the web leading roll, i.e., a device that is almost insensitive to de... Read More
Inventors: Buetikofer, Peter; Hoffmann, Martin; Schulz, Jens;, Assignee: Peters Maschinenfabrik (Hamburg, DE) |
Image forming apparatus
The first and principal object, therefore, of the present invention is to solve the aforementioned problems of the prior art by providing an image forming apparatus that accurately distinguishes, by a... Read More
Inventors: Takagi, Atsushi;, Assignee: Fuji Photo Film Co., Ltd. (Kanagawa, JP) |
Exposure controlling apparatus
The present invention has been made in view of the above circumstances and has a primary object to provide a compact exposure controlling apparatus capable of being mass produced at low cost and of ov... Read More
Inventors: Terashita, Takaaki;, Assignee: Fuji Photo Film Co., Ltd. (Kanagawa, JP) |
Method and apparatus for writing onto a photosensitive material using a modulated light beam
OF THE PRESENT INVENTION Referring to FIGS. 1 and 2, there is illustrated a printer 10 made in accordance with the present invention. The printer 10 includes a white light source 12. In the particula... Read More
Inventors: Wess, Raymond Eugene; Meyers, Mark Marshall;, Assignee: Eastman Kodak Company (Rochester, NY) |