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 Magnetic recording medium with protective layer using graphite fluoride and method of producing same

Details
Inventors: Tsukamoto, Yuji;
Assignee: NEC Corporation (JP)
Primary Examiner: Thibodeau; Paul J.
Assistant Examiner:
Attorney, Agent or Firm: Laff, Whitesel, Conte & Saret

In a magnetic recording medium such as a magnetic disk, a protective coating excellent in both mechanical durability and corrosion resistance is provided on a layer of a magnetic recording material, which may be a metal film, by jointly using graphite fluoride and an inorganic nonmetallic hard compound which can be selected from oxides such as SiO.sub.2 and Al.sub.2 O.sub.3, nitrides such as SiN and AlN and carbides such as SiC and WC. The protective coating may be either a single layer of a mixture of graphite fluoride and a hard compound formed by co-sputter deposition or a two-layer coating made up of an inner layer of a hard compound and an outer layer of sputter deposited graphite fluoride.

DETAILED DESCRIPTION What is claimed is: 1.
A magnetic recording medium, comprising: a substrate; a magnetic recording layer which is a thin ferromagnetic metal film formed on the substrate; and a protective layer which overlies the magnetic recording layer and is formed of a mixture of graphite fluoride and at least one inorganic nonmetallic hard compound, said graphite fluoride occupying 10-50 volume percent of said mixture.
2.
A magnetic recording medium according to claim 1, wherein said at least one inorganic nonmetallic hard compound comprises an oxide.
3.
A magnetic recording medium according to claim 2, wherein said oxide is selected from the group consisting of SiO.
sub.
2 and Al.
sub.
2 O.
sub.
3.
4.
A magnetic recording medium according to claim 1, wherein said at least one inorganic nonmetallic hard compound comprises a nitride.
5.
A magnetic recording medium according to claim 4, wherein said nitride is selected from the group consisting of SiN and AlN.
6.
A magnetic recording medium according to claim 1, wherein said at least one inorganic nonmetallic hard compound comprises a carbide.
7.
A magnetic recording medium according to claim 6, wherein said carbide is selected from the group consisting of SiC and WC.
8.
A magnetic recording medium according to claim 1, wherein said graphite fluoride occupies 20-40 volume % of said mixture.
9.
A magnetic recording medium, comprising: a substrate; a magnetic recording layer which is a thin ferromagnetic metal film formed on the substrate; an inner protective layer which overlies the magnetic recording layer and is formed of at least one nitride selected from the group consisting of SiN and AlN; and an outer protective layer which overlies the inner protective layer and is formed of graphite fluoride.
10.
A method of producing a magnetic recording medium, comprising the steps of: forming a thin ferromagnetic metal film to be used as a magnetic recording layer on a substrate; and co-sputter depositing graphite fluoride and at least one inorganic nonmetallic hard compound on the ferromagnetic metal film so as to form a protective layer of a mixture 10-50 volume % of graphite fluoride and the balance of said at least one hard compound



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