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 Optical instrument for measuring displacement

Details
Inventors: Taniguchi, Kayoko; Tsuchiya, Hideki; Toyama, Masaaki;
Assignee: Sony Magnescale Incorporation (Tokyo, JP)
Primary Examiner: Willis; Davis L.
Assistant Examiner: Koren; Matthew W.
Attorney, Agent or Firm: Hill, Van Santen, Steadman & Simpson

Optical instrument for measuring displacement comprising a movable diffraction grating used as a scale, a semiconductor laser device, photodetectors, and means for making two light beams diffracted by the diffraction grating interfere with each other in which displacement of said diffraction grating is measured, based on variations of interference signals. The laser device has a suitable coherency for making selectively two necessary light beams with equal optical path lengths interfere with each other.

DETAILED DESCRIPTION This invention has been made in order to take measures against the problems mentiond above and an object of this invention is to provide an optical instrument for measuring displacement, which eliminates the drawbacks of the prior art techiques by detecting a difference between the optical path lengths of the two beams and by adjusting the optical path lengths without any special high precision elements or mechanisms and to make selective light beams interfere with each other.
In order to achieve this object, according to this invention, a suitably coherent multimode semiconductor laser is used as a light source and interference between two light beams diffracted by a diffraction grating is measured.
The invention is described in more detail below using some preferred embodiments.



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