Sample-moving automatic analyzing apparatus

DETAILED DESCRIPTION An object of the present invention is to eliminate the aforementioned problems and provide a sample.
moving sample and apparatus malfunction during irradiation with an electron beam can be prevented by moving the electron beam between analytical areas while irradiation of unsuitable locations with the electron beam is avoided.
According to the apparatus of the invention, the sample is observed under an optical microscope, the image from the microscopic is picked up by a television camera, and the resulting video signal is displayed on a CRT.
While viewing the image displayed on the CRT, an operator selects areas to be analyzed, the positions at which analysis is to take place, and non.
irradiated areas at which irradiation is not to be performed, and the operator then sets a path of travel of the electron beam between analytical areas or analytical positions in such a manner that the electron beam will not pass through the non irradiated areas.
The setting of the path of travel is performed by designating it on the CRT image by means of a mouse or cursor and then having a computer read the designated path of travel.
Further, the setting of the path of travel can be carried out by having a travel-path computing unit compute coordinate data indicative of the analytical areas, analytical positions and non-irradiated areas displayed on the CRT.
The apparatus of the invention is so arranged that a sample stage drive unit is driven and controlled by the travel-path data stored in the computer, whereby the optic axis of the electron beam is moved along the travel path.
After the electron beam has been moved along the travel path to the next area to be analyzed, this area is scanned by the electron beam and analyzed.
The scanning is performed by the sample-stage drive unit or by a scanning coil.
As described above, damage to the sample by irradiation with the electron beam can be prevented by having a computer move the electron beam along the travel path to move the electron beam between areas to be analyzed