 High speed signal and power supply bussing for liquid crystal displays |
| The present invention is directed to a Liquid Crystal Display (LCD) device comprising an optically ... |
|
| Ferroelectric smectic liquid crystal device |
| It is therefore an object of the present invention to provide a ferroelectric smectic liquid ... |
|
| Liquid crystal cell |
| What we claim is: 1. Process for the manufacture of a liquid crystal cell having a film of liquid ... |
|
| Liquid crystal devices having uniform thermal expansion coefficient components |
| Hence, an objective of this invention is to devise a liquid crystal cell which will not warp or ... |
|
| Copper texturing process |
| The invention is a room-temperature dry process for texturing copper, to improve adhesion of ... |
|
| Lock for loading and unloading goods into a treatment apparatus having a protective atmosphere |
| The present invention is directed to creating a lock for loading and unloading a treatment facility ... |
|
| TFT array for liquid crystal displays allowing in-process testing |
| The aforementioned problems are overcome and other advantages are realized by an array of TFT ... |
|
| Wide-frame electro-optic device |
| It is an object of the present invention to provide an electro-optic device having a wide display ... |
|
| Electro-optic light shutter and frame assembly with integrated switching mechanism |
| The present invention overcomes the above-mentioned shortcomings associated with existing light ... |
|
|
Spectroscopic ellipsometer
| Details |
Inventors: Le Bris, Jean; Erman, Marko;
Assignee: U.S. Philips Corporation (New York, NY)
Primary Examiner: Willis; Davis L.
Assistant Examiner: Koren; Matthew W.
Attorney, Agent or Firm: Miller; Paul R.
A spectroscopic ellipsometer comprises an illumination device having a focal point (F'.sub.2) for illuminating a surface of a sample (E) in accordance with a given angle of incidence and a device for analyzing the light reflected from the surface of the sample. The sample support comprises three translation plates (20,30,40) in accordance with three respective directions (T.sub.2, T.sub.3, T.sub.1). The translations in accordance with the first (T.sub.1) and second (T.sub.2) directions make it possible to realise cartographic representations of the sample (E) and the translation in accordance with the third direction (T.sub.3) makes it possible to cause a point on the surface of the same (E) to coincide with the focal point (F'.sub.2). Two plates (PT.sub.2, 12) rotating about the axes O.sub.1 and O.sub.2, respectively, parallel to the first (T.sub.1) and second (T.sub.2) directions and intersecting each other at the focal point (F'.sub.2) provide the possibility of orienting the sample (E) by means of rotation in two orthogonal planes about the focal point (F'.sub. 2). |
|
DETAILED DESCRIPTION What is claim is: 1.
A spectroscopic ellipsometer comprising a sample, illumination means having a focal point for illuminating a surface of said sample at a given angle of incidence, analyzing means for analyzing light reflected from said surface of said sample, and sample support means for supporting said sample, said sample support means including structural means for adjusting said surface to provide a selected point on said surface in coincidence with said focal point, said sample support means further including three orthogonal translation plates for realizing cartographic representations of said sample, where a first translation plate extends in a first horizontal direction, where a second translation plate extends in a second horizontal direction, said second direction being perpendicular to said first direction, and where a third translation plate extends in a third direction perpendicular to said first and second directions, said third plate moving said selected point on said surface of said sample to coincide with said focal point, and at least two rotating plates, where a first of said rotating plates rotates about a first axis parallel to said first horizontal direction, and where a second of said rotating plates rotates about a second axis parallel to said second horizontal direction, said first axis and said second axis intersecting each other at a point coinciding with said focal point, said sample being oriented by rotation in two orthogonal planes about said focal point.
2.
A spectroscopic ellipsometer according to claim 1, wherein said sample support means is mounted on a rotary support having a vertical axis passing through said focal point, said analyzing means being mounted on said rotary support to modify said angle of incidence.
3.
A spectroscopic ellipsometer according to claim 1 or claim 2, wherein said sample support means also includes a third rotating plate, said third rotating plate having a third axis of rotation perpendicular to both said first axis and said second axis, said sample being rotatable in its own plane
|
| Related patents |
|
|
Method of optically detecting position of object and position detecting apparatus using the method
Accordingly, an object of the present invention is to provide a method of optically detecting the position of an object, as well as a position detecting apparatus, ...
|
|
|
Fiber optic interferometer using two wavelengths or variable wavelength
Accordingly, one object of the present Invention is to provide a novel physical sensor. Another object is to provide a novel physical sensor utilizing a fiber optic ...
|
|
|
Folding arm for overhead projector
The foregoing objective is achieved in a portable overhead projector having a folding arm. The arm is pivotally connected to the base, and is part of a four-bar linkage ...
|
|
|
Sequential control circuit means
Accordingly, an esential object of the present invention is to provide a sequential control circuit means for controlling the sequential functioning of a plurality of ...
|
|
|
Film feeding apparatus
The present invention aims to eliminate the above-mentioned conventional drawbacks, and, therefore, an object of the present invention is to provide a film feeding ...
|
|
|
Ultrasonic frequency synthesizer for phaco surgery
An ultrasonic frequency synthesizer for a phaco surgery handpiece in accordance with the present invention generally includes means for storing a plurality of sets of ...
|
|
|
Compression and expansion circuitry for a recording and playback system
Referring to the drawings and particularly to FIGS. 1 through 3, an apparatus includes a first optional scanner 10 and a second optical scanner 12 which are adapted to ...
|
|
|
Disc reproducing system
It is a general object of the present invention, in one aspect thereof, to provide a novel and useful information signal recording medium of rotary type in which the ...
|
|
|
High voltage switch structure with light responsive diode stack
What is claimed is: 1. An electrical switch, device comprising: a first PIN diode comprising a substantially intrinsic first semiconductor portion including mutually ...
|
|
|
Liquid crystal display device having electrodes shaped to compensate for positioning error
In a matrix-type liquid crystal display of the present invention as illustrated in the below-described embodiments, the scanning electrodes and the two sets of signal ...
|
|
|
Optical Systems 
