Semiconductor processing systems

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS This disclosure of the invention is submitted in furtherance of the constitutional purposes of the U.
S.
Patent Laws "to promote the progress of science and useful arts" (Article 1, Section 8).
Processor Generally FIG.
1 shows a preferred processing system 40 according to this invention.
Processing system 40 includes a basic frame 41 which provides structural support for related components.
Processor 40 has two fundamental sections, one of which is the interface section 43.
The other fundamental section is the processing section 44.
The frame supports an enclosure envelope 45 which in FIG.
1 is shown partially removed adjacent the processing section for purposes of illustration.
The enclosure envelope encloses a working space 46 within portions of processor 40.
Wafers 50 are held and maneuvered within the enclosed working space.
The wafers are moved between multiple processing stations 71-73 contained within the processing section 44.
The working space can be supplied with a purge gas and operated at either slightly elevated or slightly reduced pressures relative to ambient atmospheric pressure.
The upper portions of processor 40 are provided with an interface filter section 38 and a processing filter section 39.
These filter sections preferably employ HEPA type ultrafiltration filters.
Air moving equipment forces air through the filters and downwardly into the working space to move contaminants downwardly and out through the back side of the processor.
The multi-station processor 40 also preferably has a process station maintenance section 53 which is separated from the work space 26 by portions of the enclosure envelope 45.
Processor 40 also preferably has an instrumentation and control section 54 mounted rearwardly from the interface section 43.
Control section 54 preferably includes various control equipment used in processor 40.
Maintenance section 53 and control section 54 are of potentially higher contamination levels due to the presence of various equipment components associated with the processing stations