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 Contrast enhancement layer compositions, alkylnitrones, and use

Details
Inventors: West, Paul R.; Davis, Gary C.; Regh, Karen A.;
Assignee: MicroSi, Inc. (Phoenix, AZ)
Primary Examiner: Schofer; Joseph L.
Assistant Examiner: Mulcahy; Peter D.
Attorney, Agent or Firm: Davis Hoxie Faithfull & Hapgood

Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.

DETAILED DESCRIPTION What is claimed and sought to be protected by Letters Patent of the United States is as follows: 1.
Spin castable contrast enhancement layer compositions useful in mid-UV photolithographic imaging comprising, by weight, (A) 100 parts of solvent, (B) 1 to 30 parts of inert organic polymer binder, and (C) 1 to 30 parts of (i) an arylalkylnitrone selected from the group consisting of .
alpha.
-cinnamyl-N-isopropylnitrone, .
alpha.
cinnamyl-N-t-butylnitrone, .
alpha.
-cinnamyl-N-ethylnitrone, .
alpha.
phenyl-N-t-butylnitrone, .
alpha.
-anisyl-N-methylnitrone, .
alpha.
-anisyl-N-t-butylnitrone, .
alpha.
-(4-diethylaminophenyl)-N-methylnitrone, .
alpha.
-(4-cyanophenyl)-N-methylnitrone, .
alpha.
-(4-dimethylaminocinnamyl)-N-methylnitrone, .
alpha.
-p-tolyl-N-methylnitrone, .
alpha.
-(3,4-dimethylphenyl)-N-methylnitrone, .
alpha.
-phenyl-N-methylnitrone, terephthalyl-bismethylnitrone, .
alpha.
-(4-phenylbutadienyl)-N-methylnitrone, .
alpha.
-(4-hydroxyphenyl)-N-methylnitrone, .
alpha.
-furyl-N-methylnitrone, .
alpha.
-furyl-N-isopropylnitrone, .
alpha.
-(4-quinolinyl)-N-methylnitrone, .
alpha.
-(2-thiophenyl)-N-methylnitrone, .
alpha.
-(2-N-methylpyrrolyl)-N-methylnitrone, and .
alpha.
-(4-methoxycinnamyl)-N-methylnitrone, (ii) a dialkylnitrone selected from the group consisting of bisnitrones derived from glyoxyl and alkylhydroxylamines, or (iii) an alkylnitrone of the formula, ##STR3## wherein Z is selected from the group consisting of ##STR4## a C.
sub.
(4-20) aromatic heterocyclic radical having one or more O, N, or S atoms or a mixture of such heterocyclic atoms, a C.
sub.
(6-20) aromatic hydrocarbon radical, and a C.
sub.
(6-20) aromatic hydrocarbon radical substituted with one or more nuclear bound neutral radicals, wherein R, R.
sub.
1, and R.
sup.
2 are monovalent radicals selected from the group consisting of hydrogen, C.
sub.
(1-10) alkyl, C.
sub.
(1-10) alkyl substituted with neutral radicals, C.
sub.
(6-20) aromatic hydrocarbon, and C.
sub.
(6-20) aromatic hydrocarbon substituted with neutral radicals, wherein R.
sup.
3 is selected from the group consisting of C



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