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 Contrast-enhancing agent for photolithography

Details
Inventors: Ichimura, Kunihiro; Yonezawa, Teruhiko; Kikuchi, Hideo; Tochizawa, Nariaki; Hayashi, Keiichi;
Assignee: Director General of Agency of Industrial Science and Technology (Tokyo, JP); Toyo Gosei Kogyo Co., Ltd. (Chiba, JP)
Primary Examiner: Michl; Paul R.
Assistant Examiner: Buscher; Mark R.
Attorney, Agent or Firm: Hopgood, Calimafde, Kalil, Blaustein & Judlowe

The invention provides a novel contrast-enhancing agent for photolithography which is used as an overcoating on a positive-working photoresist layer for enhancing the contrast of the photoresist in a low-contrast exposure to light. The composition comprises, in addition to a watersoluble polymer, e.g., poly(vinyl alcohol), poly(vinyl pyrroilidone) and pullulan, as the binder, a specific photo-bleachable organic compound having, in a molecule, at least one nitrogen-containing heterocyclic aromatic structure represented by the general formula ##STR1## in which Z is a divalent group to form the heterocyclic aromatic ring with the nitrogen atom, X is an anionic group of monovalency and n is a positive integer of, e.g., 1 or 2.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As is understood from the above given summary of the invention, the essential components in the inventive contrast-enhancing agent is the specific photo-bleachable compound having, in a molecule, at least one nitrogen-containing heterocyclic structural unit of the general formula (I) as the component (a) and a water-soluble polymeric binder as the component (b).
The photo-bleachable compound as the component (a) is preferably a compound represented by the general formula (Ia) given above.
In this general formula (Ia), the group denoted by A is a substituted or unsubstituted aromatic group which is exemplified by phenyl, naphthyl, furyl, anthranyl, thienyl and benzofuryl groups as the examples of the unsubstituted aromatic groups.
When the group denoted by A is a substituted aromatic group, the substituent can be selected from the class consisting of those atoms and groups capable of substituting on the aromatic nucleus including halogen atoms as well as hydroxy, alkyl, alkoxy, formyl and acyl groups.
The heterocyclic aromatic structure of the formula ##STR9## in the characteristic structural unit of the general formula (Ia) without the portion of A--CH.
dbd.
CH).
sub.
n can be derived from one of the compounds represented by the following general formulas: ##STR10## In these formulas, the symbols R.
sup.
1 and R.
sup.
2 each have the same meaning as defined above and the symbol R.
sup.
3 in the formulas may have the same meaning as R.
sup.
1.
Further, the symbol X in the general formula (I) or (Ia) denotes an anionic group of monovalency such as ions of halogen, sulfate, alkyl sulfate, phosphate, sulfonate and the like.
It is optional that two kinds or more of these photo-bleachable compounds are used in the inventive contrast-enhancing agent in combination.
The subscript n in the general formula (I) or (Ia) is a positive integer and, although the value of n has no particular upper limit, it is preferable that n has a value of 1, 2 or 3 or, more preferably, 1 or 2 so that preferable photo-bleachable compounds are represented by the following general formula (II) or (III): ##STR11## in which the symbols A, Z, R



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