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Details
Inventors: Asada, Norihiro;
Assignee: Nihon Shingo Kabushiki Kaisha (Saitama-Ken, JP)
Primary Examiner: Banera; Ray
Assistant Examiner:
Attorney, Agent or Firm: Byrne, et al.; Carella, Olstein; Elliot M., Squire; William

An electromagnetic actuator for driving a movable plate equipped with an optical element such as a mirror on the basis of the operation principle of a galvanometer. The structure of the movable plate is simplified, and a driving coil and a wiring are formed by aluminium vapor deposition to improve durability. When an impact brings the movable plate outside the allowable rocking range of the movable plate, a stopper prevents excessive displacement of the movable plate to thereby prevent destruction of a torsion bar that supports the movable plate. Moreover, electrical connection in the torsion bar is eliminated to prolong the service life, and a production process is simplified to reduce a production cost.

DETAILED DESCRIPTION An electromagnetic actuator according to an embodiment of the present invention comprises an external movable plate formed integrally with a semiconductor substrate.
A first torsion bar swingably supports the movable plate with respect to the semiconductor substrate.
An internal movable plate is disposed interior the external movable plate.
A second torsion bar rotatably supports the internal movable plate relative to the external movable plate and positioned at a right angle relative to the first torsion bar.
A single turn first driving coil extends around the external movable plate.
A second driving coil extends around the internal movable plate and is connected in series to the first driving coil.
Magnetic field generating means apply a magnetic field to the first and second driving coils.
An optical element having an optical axis is on the internal movable plate.
The first and second coils are responsive to a current applied thereto to produce a force, The external and internal movable plates move in response to the force applied thereto by the driving coils to vary the direction of displacement of the optical axis.
An electromagnetic actuator according to a further embodiment comprises a movable plate formed integrally with a semiconductor substrate.
A torsion bar swingably supports the movable plate with respect to the semiconductor substrate.
An external movable plate is formed integrally with a semiconductor substrate.
A driving coil extends around the movable plate.
Magnetic field generating means applies a magnetic field to the driving coil.
An optical element having an optical axis is formed on the movable plate.
The coil is responsive to a current applied thereto to produce a force for displacing the movable plate to vary the direction of displacement of the optical axis.
A stop member is coupled to the substrate and is disposed facing at least one surface of the movable plate for preventing excessive displacement of the movable plate in the presence of physical shock


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