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 Gas discharge structure for an R.F. excited gas laser

Details
Inventors: Allcock, Geoffrey;
Assignee: Coherent, Inc. (Palo Alto, CA)
Primary Examiner: Scott, Jr.; Leon
Assistant Examiner:
Attorney, Agent or Firm: Limbach, Limbach & Sutton

A gas discharge structure for an R.F. discharge excited gas laser comprising an R.F. electrode (1), a ground electrode (2) and a metal coolant carrying pipe (4) carried bie said R.F. electrode. The pipe (4) is connected at each end to coolant source or drain at ground potential. The coolant carrying pipe (4) is inductively decoupled at each end from ground potential and has a wall thickness many times greater than the "R.F. skin depth" at the R.F. frequency of operation.

DETAILED DESCRIPTION I claim: 1.
A gas discharge structure for an R.
F.
discharge excited gas laser comprising: an R.
F.
electrode; a ground electrode; and means for cooling said R.
F.
electrode, said means including a metal coolant carrying pipe the ends of which are connectable to a coolant source at ground potential, with the sections of the pipe between a center section and the ends having sufficient inductance at the R.
F.
frequency of operation to decouple each end from ground potential.
2.
A gas discharge structure for an R.
F.
discharge excited gas laser as recited in claim 1 wherein said metal coolant carrying pipe has a wall thickness many times greater than the R.
F.
skin depth at the R.
F.
frequency of operation.
3.
A gas discharge structure for an R.
F.
discharge excited gas laser according to claim 1 wherein said inductive sections of the pipe are coiled to increase the inductance thereof.
4.
A gas discharge structure for an R.
F.
discharge excited gas laser according to claims 1 or 3 wherein a capacitor is connected in parallel with each inductive section of the pipe and is tuned to parallel resonance with the inductive section at the R.
F.
frequency of operation.
5.
A gas discharge structure for an R.
F.
discharge excited gas laser according to claim 1 wherein said coolant carrying pipe is secured to the surface of the R.
F.
electrode, in thermal contact therewith.
6.
A gas discharge structure for an R.
F.
discharge excited gas laser according to claim 1 wherein the radially outer portion of said center section of the coolant carrying pipe defines the R.
F.
electrode.
7.
A gas discharge structure for an R.
F.
discharge excited gas laser comprising: a tubular outer ground electrode; a radially inner metal coolant carrying pipe the ends of which are connected to and supported by the ground electrode, and wherein the radially outer portion of the center section of said coolant carrying pipe defines an R.
F.
electrode, and with the sections of the pipe between the center section and the ends having sufficient inductance at the R



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