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 Method of making planarized, self-aligned bipolar integrated circuits

Details
Inventors: Liu, Michael S.; Chen, Huang-Joung;
Assignee: Honeywell Inc. (Minneapolis, MN)
Primary Examiner: Hearn; Brian E.
Assistant Examiner: Thomas; Tom
Attorney, Agent or Firm: Bruns; Gregory A.

A method for making a bipolar integrated circuit structure in a semiconductor substrate. A layer of insulating material having an implantation opening is formed on the upper surface of the semiconductor substrate. A polysilicon layer is formed in the implantation opening. A doping material is implanted into the polysilicon-filled opening. The doping material is diffused into the substrate material from the polysilicon-filled opening.

DETAILED DESCRIPTION The present invention is a method of making a bipolar integrated circuit structure in a semiconductor substrate comprising the steps of forming an implantation opening in a layer of insulating material on the upper surface of the semiconductor substrate, forming a polysilicon layer in the opening formed in the insulating material layer, and implanting into the polysilicon-filled opening a doping material capable of diffusing into the substrate material below the polysilicon-filled opening.



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