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| Contrast-enhancing agent for photolithography |
| OF THE PREFERRED EMBODIMENTS As is understood from the above given summary of the invention, the ... |
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Water-soluble photopolymer and method of forming pattern by use of the same
| Details |
Inventors: Sasago, Masaru; Endo, Masayuki; Takeyama, Kenichi; Nomura, Noboru;
Assignee: Matsushita Electric Industrial Co., Ltd. (Osaka, JP)
Primary Examiner: Michl; Paul R.
Assistant Examiner: Hamilton; Cynthia
Attorney, Agent or Firm: Wenderoth, Lind & Ponack
This invention relates to a composition of a water-soluble photopolymer which is synthesized from a water-soluble organic matter, which matter is a base polymer produced and refined particularly by bacterial culture biotechnically and contains at least one of polysaccharides, protein, gelatin, casein, polyvinyl pyrrolidone and polyvinyl alcohol, in particular pullulan which is a natural polysaccharide, and chemicals to add functions to aqueous solution of the base polymer, for example, water-soluble radiation sensitive chemical, crosslinking agent, catalyst, epoxy compound, and a compound possessing bleaching or fading action with respect to radiation. The water-soluble photopolymer can be developed in water, and is high in safety and small in aging, and is expected to be used as the material of single-layer resist or multi-layer resist of high resolution and high resistance, or as the material for contrast enhanced litography. Besides, when it is applied in said pattern forming method, much finer patterns may be formed. |
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DETAILED DESCRIPTION This invention is accordingly intended to present a water-soluble photopolymer capable of notably enhancing its resolution by utilizing the technology of photolithography by using light.
In this invention, at least one of water-soluble polymers, such as a polysaccharide, a protein, a polyvinyl pyrrolidone, and a polyvinyl alcohol, is used as the principal ingredient.
Such water-soluble polymers may be prepared by refining from an ordinary chemical synthetic technology or by refining by producing from outside of the organisms by biochemical engineering technology.
However, in this invention, the following conditions must be satisfied: (1) They must be freely soluble in water and neutral.
(2) Insoluble in inorganic solvent.
(3) Free of thixotropy such as gelation and aging.
(4) Stable viscosity despite pH changes.
(5) High heat resistance, and high transparency from ultraviolet to infrared rays.
(6) Molecular weight freely controllable from tens of thousand to millions by varying the culture conditions.
(7) Easy to mix in other agents.
(8) Free controllability of solubility ( in water, organic solvent).
because of these conditions, a refining method by biochemical technology is advantageous to satisfy because all of these requirements.
For example, in this invention, pullulan, a natural polysaccharide refined biotechnically is used as the main polymer of a water-soluble polymer.
Pullulan is also known as trigluco-polysaccharide, and it is a viscous polysaccharide produced outside the organism, that is, within the culture fluid, when Aureobasidium pullulans, which is a kind of black yeast, is incubated in proper conditions by using cane sugar or starch decomposed product as the carbon source and adding peptone and various salts to the culture medium.
The structure of pullulan is as follows.
##STR1## That is, the structure of pullulan is an orderly .
alpha.
-1, 6 bonding of maltotriose (three molecules of glucose being .
alpha.
-1, 4 bonded), and this substance satisfies all the above-discussed features, and it is applied widely in food processing, general industrial, cosmetics, pharmaceuticals and biochemical fields
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Quantum Computing 
