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Piezoelectric/electrostrictive film element
| Details |
Inventors: Takeuchi, Yukihisa; Nanataki, Tsutomu; Kimura, Koji; Takahashi, Nobuo;
Assignee: NGK Insulators, Ltd. (Nagoya, JP)
Primary Examiner: Robinson; Ellis
Assistant Examiner: Chevalier; Alicia
Attorney, Agent or Firm: Burr & Brown
A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer. |
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DETAILED DESCRIPTION OF THE DRAWINGS The above and optional objects, features and advantages of the present invention will be better understood by reading the following detailed description of the presently preferred embodiments of the invention, when considered in connection with the accompanying drawings, in which: FIG.
1 is a cross sectional view showing one example of a basic structure of a piezoelectric/electrostrictive film element according to the present invention; FIG.
2 is a view observed by an electron microscope, showing a surface of the diaphragm portion with the piezoelectric/electrostrictive unit being removed; FIG.
3 is a cross sectional view showing another example of the piezoelectric/electrostrictive film element according to the invention; and FIG.
4 is an exploded perspective view of the piezoelectric/electrostrictive film element of FIG.
3.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT There will be hereinafter described one embodiment of a piezoelectric/electrostrictive film element according to the present invention, wherein a piezoelectric/electrostrictive unit is formed by a film-forming method on an outer surface of a diaphragm portion which closes a window formed in a zirconia substrate, and wherein particles consisting principally or essentially of a compound of alumina and magnesia are deposited on the interface between the diaphragm portion and the lower electrode, which interface is located right under the piezoelectric/electrostrictive layer.
In this substrate, the zirconia substrate has one window.
Referring to FIG.
1 showing one example of a piezoelectric/electrostrictive film element (hereinafter referred to as "P/E film element) according to the present invention, a zirconia substrate 2 has an integral structure which consists of a base plate 4 having a predetermined thickness, the base plate having a rectangular window 6 of a suitable size, and a relatively thin diaphragm plate 8 which closes the window 6.
The diaphragm plate 8 is superposed on one of the opposite major surfaces of the base plate 4 which serves as a support member
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