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Electrode array microchip
| Details |
Inventors: Hubbard, Allyn E.;
Assignee: Boston University (Boston, MA)
Primary Examiner: Nguyen; Viet Q.
Assistant Examiner:
Attorney, Agent or Firm: Choate, Hall & Stewart
An electrode array microchip, fabricated preferrably using CMOS technology, comprising electrodes made with overglass cuts over metal2 regions is disclosed. Overglass cuts of dimensions approximately an order of magnitude smaller than dimensions quoted in current design rules for CMOS technology are successfully employed to make exposed electrodes of dimensions on the order of microns. Thus, the electrode array chip can be produced cheaply on commercial fabrication lines. The invention finds many uses in biology and medicine, particularly when applied to the measurement of neural electrical activity. |
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DETAILED DESCRIPTION I claim: 1.
An electrode army microchip for receiving biological electrical signals comprising: a plurality of substantially planar metal regions supported on a surface of a substrate, insulating material covering said plurality of metal regions and said surface, cuts in said insulating material, at least one of said cuts having a width of at least one micron, said cuts arranged to expose portions of said metal regions, whereby each exposed portion forms a substantially planar electrode for engagement with a biological material, and regions of metal electrically connected to said electrodes to form electrical connections from said electrodes to wire bonding or probe sites on a surface of said microchip or to integrated circuitry within said microchip, whereby biological electrical signals from said biological material detectable at said electrodes are transmitted to said wire bonding or probe sites or to said integrated circuitry.
2.
A CMOS electrode array microchip for receiving biological electrical signals comprising: a pattern of adjacently arranged and substantially planar metal regions on a surface of a substrate, adjacent regions separated by a distance, insulating material covering said pattern of metal regions and said surface, a plurality of cuts in said insulating material, said cuts arranged to expose portions of said metal regions, whereby each exposed portion forms a substantially planar electrode for engagement with a biological material, at least one cut of said plurality of cuts having a width of three microns, said width at least equal to the distance between two adjacent metal regions, and regions of metal electrically connected to said electrodes to form electrical connections from said electrodes to wire bonding or probe sites on a surface of said microchip or to integrated circuitry within said microchip, whereby biological electrical signals from said biological material detectable at said electrodes are transmitted to said wire bonding or probe sites or to said integrated circuitry
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Semiconductor manufacture 
