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Methods for manufacturing a filter
| Details |
Inventors: Saaski, Elric W.; Lawrence, Dale M.;
Assignee: Research International, Inc. (Woodinville, WA)
Primary Examiner: Powell; William
Assistant Examiner:
Attorney, Agent or Firm: Moravan; Gregory W.
The fluid handling devices are capable of accurately handling substantially continuous fluid flow rates as low as about 0.01 cc/day. The devices are so miniaturized, corrosion-resistant and non-toxic that they are suitable for being implanted in the human body; and are capable of being mass produced at costs so low, by using micromachining techniques, such as etching, that they may be considered to be disposable. The devices are either passive devices which consume no electrical energy at all, or are active devices which consume very small amounts of electrical energy. The devices are reliable because they may have as few as only two parts, only one which is a moving part; and because they may handle fluids at very low pressures. The fluid handling devices include active piezoelectrically driven membrane pumps; and passive fluid flow regulators, on-off valves, flow switches and filters. |
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DETAILED DESCRIPTION What is claimed is: 1.
A method for manufacturing a filter comprising a substrate, a membrane, and a filter element means for removing particles from an unfiltered fluid from an unfiltered fluid source; wherein said substrate comprises a mounting portion; wherein said membrane comprises a mounting portion; wherein said filter further comprises an inlet port means for receiving said unfiltered fluid from said unfiltered fluid source, and for conveying said unfiltered fluid to said filter element means; and an outlet port means for conveying a filtered fluid from said filter element means and for permitting said filtered fluid to exit from said filter; and wherein said method comprises the steps of: micromachining at least a portion of at least one of said inlet port means, said filter element means and said outlet port means, by etching at least a portion of at least one of said inlet port means, said filter element means and said outlet port means into said substrate; and securing said membrane's and substrate's mounting portions together.
2.
The method according to claim 1, wherein said filter element means comprises an array of filter slots micromachined into said substrate; and wherein said method further comprises the step of micromachining at least a portion of said array of filter slots into said substrate, by etching at least a portion of said array of filter slots into said substrate prior to performing said securing step.
3.
The method according to claim 2, wherein said inlet port means comprises an inlet cavity in said substrate for distributing said unfiltered fluid to said array of filter slots; and wherein said method further comprises the step of micromachining at least a portion of said inlet cavity into said substrate, by etching at least a portion of said inlet cavity into said substrate prior to performing said securing step.
4.
The method according to claim 2, wherein said outlet port means comprises an outlet cavity in said substrate for collecting said filtered fluid from said array of filter slots; and wherein said method further comprises the step of micromachining at least a portion of said outlet cavity into said substrate, by etching at least a portion of said outlet cavity into said substrate prior to performing said securing step
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