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 Micromechanical sensor

Details
Inventors: Moore, David Frank; Hoole, Andrew Charles Frederick; Heaver, Alan;
Assignee: British Technology Group Limited (London, GB2)
Primary Examiner: Chapman; John E.
Assistant Examiner:
Attorney, Agent or Firm: Cushman Darby & Cushman Intellectual Property Group of Pillsbury Madison & Sutro, LLP

A micromechanical sensor has a plurality of sensing elements (14a-14d) which are supported at respective support regions (12a-12d). A first set of the sensing elements defines the sensing gap. In one arrangement this is defined by sensing elements supported by adjacent support regions. In another embodiment the sensing gap is defined between one sensing element and a reference beam formed by connection of the return legs of two diametrically opposed sensing elements. The sensing elements are substantially similar one to another and each sensing element comprises an outgoing elongate leg extending away from its associated support region and a return leg substantially parallel to the outgoing leg extending towards the support region. By providing sensing elements which are substantially similar in shape and arranged in this way, the effects of thin film stress are minimized.

DETAILED DESCRIPTION We claim: 1.
A micromechanical sensor comprising a plurality of cantilever sensing elements supported on a substrate at respective support regions, a first set of said sensing elements having respective sensing portions and arranged to define a sensing gap there between and a second set of said sensing elements forming a counterpart set, the sensing elements being substantially similar one to another, and each sensing element comprising an outgoing elongate leg extending away from its respective support region and a return leg substantially parallel to the outgoing leg, extending towards the respective support region, each said outgoing elongate leg of said sensing elements of said first set having a first end fixed to said respective support region and a second longitudinal end remote therefrom each said return leg of said sensing elements of said first set having a first longitudinal end provided so as to be fixed with respect to and substantially continuous with said second longitudinal end of said outgoing elongate leg and a second, free end proximate said respective support region, said second, free end being free from attachment to another, supported structure.
2.
A micromechanical sensor according to claim 1 wherein the support regions are arranged symmetrically on the substrate.
3.
A micromechanical sensor according to claim 1 or 2 wherein the support regions are arranged in close proximity to one another and to the sensing gap.
4.
A micromechanical sensor according to claim 1, wherein the first set of sensing elements comprises sensing elements supported by adjacent support regions, the return leg of each sensing element of said first set terminating at said second free end in said respective sensing portion and the sensing portions defining between them the sensing gap, and wherein the second set of sensing elements comprises sensing elements supported by adjacent support regions, the support regions supporting the sensing elements of the second set being arranged opposite the support regions supporting the sensing elements of the first set, whereby one of the second set of sensing elements acts as a control element to attract one of the sensing elements of the first set of sensing elements and thereby close the sensing gap


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