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Polyphenylene oligomers and polymers
| Details |
Inventors: Godschalx, James P.; Romer, Duane R.; So, Ying Hung; Lysenko, Zenon; Mills, Michael E.; Buske, Gary R.; Townsend, III, Paul H.; Smith, Jr., Dennis W.; Martin, Steven J.; DeVries, Robert A.;
Assignee: The Dow Chemical Company (Midland, MI)
Primary Examiner: Mullis; Jeffrey C.
Assistant Examiner:
Attorney, Agent or Firm: Damocles; Nemia C.
An oligomer, uncured polymer or cured polymer comprising the reaction product of one or more polyfunctional compounds containing two or more cyclopentadienone groups and at least one polyfunctional compound containing two or more aromatic acetylene groups wherein at least some of the polyfunctional compounds contain three or more reactive groups. Such oligomers and uncured polymers may be cured to form cured polymers which are useful as dielectrics in the microelectronics industry, especially for dielectrics in integrated circuits. |
|
DETAILED DESCRIPTION OF THE INVENTION Preferably, the oligomers and polymers and corresponding starting monomers of the present invention are: I.
Oligomers and polymers of the general formula: [A].
sub.
w [B].
sub.
z [EG].
sub.
v wherein A has the structure: ##STR1## and B has the structure: ##STR2## wherein EG are end groups having one or more of the structures: ##STR3## wherein R.
sup.
1 and R.
sup.
2 are independently H or an unsubstituted or inertly-substituted aromatic moiety and Ar.
sup.
1, Ar.
sup.
2 and Ar.
sup.
3 are independently an unsubstituted aromatic moiety or inertly-substituted aromatic moiety, M is a bond, and y is an integer of three or more, p is the number of unreacted acetylene groups in the given mer unit, r is one less than the number of reacted acetylene groups in the given mer unit and p+r=y-1, z is an integer from 0 to about 1000; w is an integer from 0 to about 1000 and v is an integer of two or more.
Such oligomers and polymers can be prepared by reacting a biscyclopentadienone, an aromatic acetylene containing three or more acetylene moieties and, optionally, a polyfunctional compound containing two aromatic acetylene moieties.
Such a reaction may be represented by the reaction of compounds of the formulas (a) a biscyclopentadienone of the formula: ##STR4## (b) a polyfunctional acetylene of the formula: ##STR5## (c) and, optionally, a diacetylene of the formula: ##STR6## wherein R.
sup.
1, R.
sup.
2, Ar.
sup.
1, Ar.
sup.
2, Ar.
sup.
3 and y are as previously defined.
The definition of aromatic moiety includes phenyl, polyaromatic and fused aromatic moieties.
Inertly-substituted means the substituent groups are essentially inert to the cyclopentadienone and acetylene polymerization reactions and do not readily react under the conditions of use of the cured polymer in microelectronic devices with environmental species such as water.
Such substituent groups include, for example, F, Cl, Br, --CF.
sub.
3, --OCH.
sub.
3, --OCF.
sub.
3, --O--Ph and alkyl of from one to eight carbon atoms, cycloalkyl of from three to about eight carbon atoms
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