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Positive acting photoresist comprising diazide ester, novolak resin and rosin
| Details |
Inventors: Oddi, Michael J.;
Assignee:
Primary Examiner: Welsh; John D.
Assistant Examiner:
Attorney, Agent or Firm:
Rosinous material is added to photoresist compositions to improve flexiblity, rheology and other physical properties. The rosinous material may be a rosin or a hydrogenated, esterified or neutralized derivative of a rosin. Particular advantages are achieved when the photoresists also contain a polyvinyl alkyl ether. |
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DETAILED DESCRIPTION I claim: 1.
An alkali soluble, positive working photoresist composition comprising a naphthoquinone (1,2)-diazide sulfonic acid ester photosensitizer, a novolak resin in an amount of from 10 to 90% by weight, on a solids basis, of the photoresist composition, which novolak resin is rendered developable by the action of activating radiation on the photosensitizer, and a rosinous material in an amount of between about 1% and 85% by weight, on a solids basis, of the photosensitive resist composition, selected from the group of rosin, hydrogenated rosin, esterified rosin, neutralized rosin, esterified hydrogenated rosin, esterified neutralized rosin, and mixtures thereof.
2.
The composition of claim 1, wherein the rosin is selected from the group of wood rosin, gum rosin and tall oil rosin.
3.
The composition of claim 1, wherein the rosinous material is selected from the group of alkyl esters of rosin, alkoxy esters of rosin, and mixtures thereof.
4.
The composition of claim 1, wherein the rosinous material is a balsamic rosinous material.
5.
The composition of claim 1, wherein the rosinous material is selected from the group of rosin-derived elastomeric resin, methyl ester of rosin, hydrogenated methyl ester of rosin, triethylene glycol ester of rosin, and mixtures thereof.
6.
The composition of claim 1, wherein the rosinous material is an ester of rosin selected from the group of methyl, ethyl, propyl, glyceryl, ethylene glycol, diethylene glycol, and triethylene glycol esters of rosin, and mixtures thereof.
7.
The composition of claim 1, wherein the rosinous material is an ester of hydrogenated rosin, selected from the group of methyl, ethyl, propyl, glyceryl, ethylene glycol, diethylene glycol, and triethylene glycol esters of hydrogenated rosin, and mixtures thereof.
8.
The composition of claim 1 further comprising a polyvinyl ether selected from the group of polyvinyl methyl ether and polyvinyl ethyl ether, said polyvinyl ether having a K value of at least 0.
015.
9
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