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Structure or construction for mounting a pressure detector
| Details |
Inventors: Ohmi, Tadahiro; Hirose, Takashi; Ideta, Eiji; Ikeda, Nobukazu; Dohi, Ryousuke; Nishino, Kouji; Yoshikawa, Kazuhiro; Kagatsume, Satoshi; Hirose, Jun; Fukasawa, Kazuo; Koizumi, Hiroshi; Nagaoka, Hideki;
Assignee: Fujikin Incorporated (JP); Ohmi; Tadahiro (JP); Tokyo Electron Ltd (JP)
Primary Examiner: Williams; Hezron
Assistant Examiner: Ferguson; Marissa
Attorney, Agent or Firm: Griffin & Szipl, P.C.
A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member. |
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DETAILED DESCRIPTION The main object of the present invention is to solve the above-mentioned problem encountered when the diaphragm type pressure detector having the constitution shown in FIGS.
10 to 14 is actually applied to the pipe line or the like.
That is, an object of the invention is to solve the problem of lowered measurement precision, resulting from large changes in output and temperature characteristics caused by differences in stress or strain on the diaphragm, that arise when the pressure detector is mounted in the fixture main body.
This object is achieved by improvements in the structure or construction for mounting the pressure detector on the pressure detector fixture main body so that (1) when the pressure detector is fixed in the fixture main body the output and temperature characteristics will be hardly different from those observed when the pressure detector is not mounted, and (2) the pressure detector can be applied to the pipe line etc.
without increasing the dead space in the fluid passage.
An object of the invention is to provide a structure or construction for mounting a pressure detector, the pressure detector comprising a diaphragm base provided with a diaphragm and a sensor base fixed to the diaphragm base and having a built-in sensor element that is activated with displacement of the diaphragm base, the pressure detector being inserted in a mounting hole of a fixture main body mounted in a pipe line with a gasket placed under the pressure detector, the pressure detector being pressed and fixed in an air-tight manner in the mounting hole by a presser member inserted in the mounting hole from above, wherein the presser member is brought in contact with a block upper surface 4e of the diaphragm base 4 and the gasket 17 is brought in contact with a block lower surface 4f of the diaphragm base, and a shallow groove 18b in the form of a ring is defined on the block lower surface 4f at a place inward of the portion contacting the metal gasket 17 so that the strain arising from pressing by the presser member 12 is absorbed by the shallow groove 18b
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Semiconductor manufacture 
