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Surface treatment apparatus
| Details |
Inventors: Ikegaya, Hirihiko; Isobe, Masaaki; Watanabe, Masayuki;
Assignee: Yamaha Hatsudoki Kabushiki Kaisha (Iwata, JP)
Primary Examiner: Valentine; Donald R.
Assistant Examiner:
Attorney, Agent or Firm: Knobbe, Martens, Olson & Bear
An improved surface treatment system, assembly, workstation and method for plating and the like. The assembly includes a suction pump along the treating liquid discharge end to circulate treatment fluid and avoid leakage. The assembly includes a member defining a fluid passage within the interior surface of a workpiece which is connected to a treating liquid feed channel and a treating liquid discharge channel. Advantageously, a washing fluid inlet is provided to permit a workpiece to be both treated and washed at the same workstation. The assembly may be used with a cover as an additional means to avoid leakage. |
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DETAILED DESCRIPTION Applicant's invention is an improved plating treatment system including an improved fluid transfer assembly and workstation, as well as an improved plating treatment method.
An important aspect of Applicant's invention is an assembly for treating an interior surface of a workpiece, including a body, a member, a treating liquid feed channel, a treating liquid discharge channel, and a suction pump.
The body defines a support to which a workpiece is mountable.
The member defines a fluid passage for treating liquid to flow within the interior surface of a workpiece mounted on the support.
The fluid passage defines a treating liquid feed end and a treating liquid discharge end.
The treating liquid feed channel is connected to the treating liquid end of the member, and the treating liquid discharge channel is connected to the treating liquid discharge end of the member.
The suction pump is positioned along the treating liquid discharge channel to exert suction on liquid within the treating liquid discharge channel.
Desirably, the assembly is used in connection with a workpiece defining a cylinder connecting a first opening and a second opening, wherein the support secures the workpiece in an orientation such that the cylinder is vertically oriented with the second opening located above the first opening and the member positioned within the cylinder.
Another aspect of the invention is an assembly for treating an interior surface of a workpiece, including a body, a member, a treating liquid feed channel, a treating liquid discharge channel, a source of pressure, and a washing fluid inlet.
The body defines a support to which a workpiece is mountable.
The member defines a fluid passage for treating liquid to flow within the interior surface of the workpiece mounted on the support.
The fluid passage defines a treating liquid feed end and a treating liquid discharge end.
The treating liquid feed channel is connected to the treating liquid feed end of the member.
The treating liquid discharge channel is connected to the treating liquid discharge end of the member
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Semiconductor manufacture 
